Applications of MEMS have prompted the design and manufacture of fluidic devices for sub-microliter fluid flow measurement. The accuracy of flowrate in terms of traceability and repeatability provides key information for successful micro-fluidics applications. To establish a measurement standard for microflow sensors and microflow controller for liquid handling and microfluidic monitoring, a traceable measurement system at Taiwan’s NMI has been sponsoring since 2002. The applied approaches included a gravimetric approach, a virtual piston approach, and a velocity-based approach. The expected flowrate ranges from 10 mL/min down to 10 nL/min, and the measurement uncertainty is evaluated. In this paper, the gravimetric approach and the chip based volumetric approach were demonstrated of their measurement setup and capability.
Fluid flow measurement in rotor ventilation ducts