Tabletop Extreme Ultraviolet Reflection Mode Coherent Diffractive Imaging of Buried Structures

2016 ◽  
Author(s):  
Giulia F. Mancini ◽  
Dennis F. Gardner ◽  
Elisabeth R. Shanblatt ◽  
Christina L. Porter ◽  
Michael Tanksalvala ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Reflection Mode ◽  
Diffractive Imaging ◽  
Buried Structures ◽  
Coherent Diffractive Imaging

scholarly journals Colloidal crystal order and structure revealed by tabletop extreme ultraviolet scattering and coherent diffractive imaging

2018 ◽  
Vol 26 (9) ◽  
pp. 11393 ◽  
Author(s):  
Giulia F. Mancini ◽  
Robert M. Karl ◽  
Elisabeth R. Shanblatt ◽  
Charles S. Bevis ◽  
Dennis F. Gardner ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Colloidal Crystal ◽  
Diffractive Imaging ◽  
Coherent Diffractive Imaging ◽  
Ultraviolet Scattering

scholarly journals Coherent diffractive imaging methods for semiconductor manufacturing

2017 ◽  
Vol 6 (6) ◽  
Author(s):  
Patrick Helfenstein ◽  
Iacopo Mochi ◽  
Rajendran Rajeev ◽  
Sara Fernandez ◽  
Yasin Ekinci
Keyword(s):  
Extreme Ultraviolet ◽  
Imaging Techniques ◽  
Semiconductor Industry ◽  
Extreme Ultraviolet Lithography ◽  
Lensless Imaging ◽  
Diffractive Imaging ◽  
Ultraviolet Lithography ◽  
Coherent Diffractive Imaging ◽  
Cost Of Ownership ◽  
Deep Ultraviolet

AbstractThe paradigm shift of the semiconductor industry moving from deep ultraviolet to extreme ultraviolet lithography (EUVL) brought about new challenges in the fabrication of illumination and projection optics, which constitute one of the core sources of cost of ownership for many of the metrology tools needed in the lithography process. For this reason, lensless imaging techniques based on coherent diffractive imaging started to raise interest in the EUVL community. This paper presents an overview of currently on-going research endeavors that use a number of methods based on lensless imaging with coherent light.

High fidelity, general reflection-mode coherent diffractive imaging with a tabletop EUV source

CLEO: 2014 ◽  
2014 ◽  
Author(s):  
daniel adams ◽  
Bosheng Zhang ◽  
Matthew Seaberg ◽  
Dennis Gardner ◽  
Elisabeth Shanblatt ◽  
...  
Keyword(s):  
High Fidelity ◽  
Reflection Mode ◽  
Diffractive Imaging ◽  
Coherent Diffractive Imaging

Keyhole Reflection-Mode Coherent Diffractive Imaging of Nano-Patterned Surfaces Using a Tabletop EUV Source

2015 ◽  
pp. 253-257
Author(s):  
Elisabeth Shanblatt ◽  
Matthew Seaberg ◽  
Bosheng Zhang ◽  
Dennis Gardner ◽  
Margaret Murnane ◽  
...  
Keyword(s):  
Patterned Surfaces ◽  
Reflection Mode ◽  
Diffractive Imaging ◽  
Coherent Diffractive Imaging

scholarly journals Scanning coherent diffractive imaging methods for actinic extreme ultraviolet mask metrology

2016 ◽  
Vol 15 (3) ◽  
pp. 034006 ◽  
Author(s):  
Patrick Helfenstein ◽  
Istvan Mohacsi ◽  
Rajendran Rajeev ◽  
Yasin Ekinci
Keyword(s):  
Extreme Ultraviolet ◽  
Diffractive Imaging ◽  
Imaging Methods ◽  
Coherent Diffractive Imaging

scholarly journals Octave-spanning hyperspectral coherent diffractive imaging in the extreme ultraviolet range

2015 ◽  
Vol 23 (22) ◽  
pp. 28960 ◽  
Author(s):  
Yijian Meng ◽  
Chunmei Zhang ◽  
Claude Marceau ◽  
A. Yu. Naumov ◽  
P. B. Corkum ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Diffractive Imaging ◽  
Coherent Diffractive Imaging ◽  
Ultraviolet Range
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