scholarly journals Spectroscopic ellipsometry as an optical probe of strain evolution in ferroelectric thin films

2012 ◽  
Vol 20 (4) ◽  
pp. 4419 ◽  
Author(s):  
D. Y. Lei ◽  
S. Kéna-Cohen ◽  
B. Zou ◽  
P. K. Petrov ◽  
Y. Sonnefraud ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Optical Probe ◽  
Ferroelectric Thin Films ◽  
Strain Evolution

Spectroscopic ellipsometry study of 0.5BaZr 0.2 Ti 0.8 O 3 –0.5Ba 0.7 Ca 0.3 TiO 3 ferroelectric thin films

2014 ◽  
Vol 615 ◽  
pp. 526-530 ◽  
Author(s):  
Hongguang Wang ◽  
Jinbao Xu ◽  
Chao Ma ◽  
Fanglong Xu ◽  
Lei Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Ferroelectric Thin Films

Spectroscopic ellipsometry of SrBi2Ta2−xNbxO9 ferroelectric thin films

2005 ◽  
Vol 97 (10) ◽  
pp. 106106 ◽  
Author(s):  
Pingxiong Yang ◽  
Ming Guo ◽  
Meirong Shi ◽  
Xiangjian Meng ◽  
Zhimin Huang ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Ferroelectric Thin Films

In SituAnnealing Studies of Sol-Gel Ferroelectric Thin Films by Spectroscopic Ellipsometry

1995 ◽  
Vol 78 (7) ◽  
pp. 1907-1913 ◽  
Author(s):  
Susan Trolier-McKinstry ◽  
Jiayu Chen ◽  
Kuppuswami Vedam ◽  
Robert E. Newnham
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Sol Gel ◽  
Ferroelectric Thin Films

Spectroscopic Ellipsometry Study on Strain Evolution of Transparent Conductive Thin Films Prepared by RF Sputtering Method

2015 ◽  
Vol 1110 ◽  
pp. 222-225 ◽  
Author(s):  
Keh Moh Lin ◽  
Yang Hsien Lee ◽  
Wen Yeong Huang ◽  
Ching Tsun Hsieh ◽  
Chih Kai Hsu
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Stress Analysis ◽  
Spectroscopic Ellipsometry ◽  
Strain Relaxation ◽  
Rf Sputtering ◽  
The State ◽  
Strain Evolution ◽  
Conductive Thin Films ◽  
Deposited Films

In this study, AZO films were deposited by RF sputtering technique. Then, the state of residual stress in the AZO films was investigated by using spectroscopic ellipsometry (SE) and XRD methods. Our experiments show that a suitable SE model could provide useful indication about the variation of stress in the as-deposited films. However, there is a disparity in the results of the SE fitting and XRD stress analysis for annealed AZO films. Further investigation is required in order to understand the cause of this contradiction. Despite this disparity, the SE technique enables us to monitor strain relaxation in TCO films with a faster and simpler way compared with other methods.

Spectroscopic ellipsometry study of SrBi2Ta2O9 ferroelectric thin films

2001 ◽  
Vol 79 (11) ◽  
pp. 1664-1666 ◽  
Author(s):  
Jae Ho Bahng ◽  
Mierie Lee ◽  
H. L. Park ◽  
Ill Won Kim ◽  
Jung Hyun Jeong ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Ferroelectric Thin Films

SrBi2Nb2O9 ferroelectric thin films

1998 ◽  
Vol 08 (PR9) ◽  
pp. Pr9-225-Pr9-228
Author(s):  
J. H. Yi ◽  
P. Thomas ◽  
M. Manier ◽  
J. P. Mercurio ◽  
I. Jauberteau ◽  
...  
Keyword(s):  
Thin Films ◽  
Ferroelectric Thin Films
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