A 300mm CMOS-compatible PECVD silicon nitride platform for integrated photonics with low loss and low process induced phase variation

2019 ◽  
Author(s):  
Sandeep S. Saseendran ◽  
Tangla D. Kongnyuy ◽  
Bruno Figeys ◽  
Federico Buja ◽  
Benedetto Troia ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Phase Variation ◽  
Integrated Photonics ◽  
Low Loss ◽  
Cmos Compatible

scholarly journals Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths

2013 ◽  
Vol 21 (12) ◽  
pp. 14036 ◽  
Author(s):  
Sebastian Romero-García ◽  
Florian Merget ◽  
Frank Zhong ◽  
Hod Finkelstein ◽  
Jeremy Witzens
Keyword(s):  
Silicon Nitride ◽  
Integrated Photonics ◽  
Cmos Compatible ◽  
Visible Wavelengths

scholarly journals Optimized low-loss integrated photonics silicon-nitride Y-branch splitter

2020 ◽  
Author(s):  
I. A. Krutov ◽  
M. Yu. Saygin ◽  
I. V. Dyakonov ◽  
S. P. Kulik
Keyword(s):  
Silicon Nitride ◽  
Integrated Photonics ◽  
Low Loss

scholarly journals Low Loss CMOS-Compatible PECVD Silicon Nitride Waveguides and Grating Couplers for Blue Light Optogenetic Applications

2016 ◽  
Vol 8 (5) ◽  
pp. 1-11 ◽  
Author(s):  
Luis Hoffman ◽  
Ananth Subramanian ◽  
Philippe Helin ◽  
Bert Du Bois ◽  
Roel Baets ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Blue Light ◽  
Low Loss ◽  
Grating Couplers ◽  
Cmos Compatible

scholarly journals Low loss CMOS-compatible silicon nitride photonics utilizing reactive sputtered thin films

2019 ◽  
Vol 27 (26) ◽  
pp. 37795 ◽  
Author(s):  
Andreas Frigg ◽  
Andreas Boes ◽  
Guanghui Ren ◽  
Islam Abdo ◽  
Duk-Yong Choi ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Nitride ◽  
Low Loss ◽  
Cmos Compatible

CMOS-compatible, low-loss deuterated silicon nitride photonic devices for optical frequency combs

2018 ◽  
Author(s):  
Jeff Chiles ◽  
Nima Nader ◽  
Daniel D. Hickstein ◽  
Su Peng Yu ◽  
Travis Crain Briles ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Photonic Devices ◽  
Optical Frequency ◽  
Low Loss ◽  
Optical Frequency Combs ◽  
Frequency Combs ◽  
Cmos Compatible

Delay-Sum Group Delay Controller With Low-Loss and Low-Phase Variation

2021 ◽  
Vol 69 (1) ◽  
pp. 825-832
Author(s):  
Kyutae Park ◽  
Byung-Wook Min
Keyword(s):  
Group Delay ◽  
Phase Variation ◽  
Low Loss

scholarly journals Optically pumped Si nanocrystal emitter integrated with low loss silicon nitride waveguides

2007 ◽  
Vol 15 (22) ◽  
pp. 14679 ◽  
Author(s):  
J. N. Milgram ◽  
J. Wojcik ◽  
P. Mascher ◽  
A. P. Knights
Keyword(s):  
Silicon Nitride ◽  
Optically Pumped ◽  
Low Loss ◽  
Si Nanocrystal

Low-loss Non-volatile Phase-change Integrated Photonics at 1550nm and 750nm

2021 ◽  
Author(s):  
Zhuoran Fang ◽  
Jiajiu Zheng ◽  
Abhi Saxena ◽  
James Whitehead ◽  
Yueyang Chen ◽  
...  
Keyword(s):  
Phase Change ◽  
Integrated Photonics ◽  
Low Loss ◽  
Volatile Phase

Ultra-Low-Loss and Broadband Micromachined Inductors and Transformers for 30-100 GHz CMOS RFIC Applications by CMOS-Compatible ICP Deep Trench Technology

2007 ◽  
Author(s):  
Jin-Fa Chang ◽  
Yo-Sheng Lin ◽  
Chang-Zhi Chen ◽  
Chi-Chen Chen ◽  
Po-Feng Yeh ◽  
...  
Keyword(s):  
Low Loss ◽  
Deep Trench ◽  
Cmos Compatible ◽  
Cmos Rfic
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