scholarly journals Fabrication and metrology of high NA imaging optics for EUV-lithography

2002 ◽  
Author(s):  
Udo Dinger
Keyword(s):  
Euv Lithography ◽  
Imaging Optics

Status of the liquid-xenon-jet laser-plasma source for EUV lithography

2002 ◽  
Author(s):  
Bjoern A. M. Hansson ◽  
Lars Rymell ◽  
Magnus Berglund ◽  
Oscar E. Hemberg ◽  
Emmanuelle Janin ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Liquid Xenon ◽  
Euv Lithography

Toward the In Situ Remediation of Carbon Deposition on Ru-Capped Multilayer Mirrors Intended for EUV Lithography:  Exploiting the Electron-Induced Chemistry

2007 ◽  
Vol 111 (33) ◽  
pp. 12165-12168 ◽  
Author(s):  
David J. Davis ◽  
Georgios Kyriakou ◽  
Robert B. Grant ◽  
Mintcho S. Tikhov ◽  
Richard M. Lambert
Keyword(s):  
Carbon Deposition ◽  
In Situ Remediation ◽  
Multilayer Mirrors ◽  
Euv Lithography

Lithographic performance and optimization of chemically amplified single-layer resists for EUV lithography

2000 ◽  
Author(s):  
Takeo Watanabe ◽  
Hiroo Kinoshita ◽  
Atsushi Miyafuji ◽  
Shigeo Irie ◽  
Shigeru Shirayone ◽  
...  
Keyword(s):  
Single Layer ◽  
Chemically Amplified ◽  
Euv Lithography

Efficient multi-die placement for blank defect mitigation in EUV lithography

2012 ◽  
Author(s):  
Yuelin Du ◽  
Hongbo Zhang ◽  
Martin D. F. Wong ◽  
Yunfei Deng ◽  
Rasit O. Topaloglu
Keyword(s):  
Euv Lithography

Development of laser-produced plasma-based EUV light source technology for HVM EUV lithography

2012 ◽  
Author(s):  
Junichi Fujimoto ◽  
Tsukasa Hori ◽  
Tatsuya Yanagida ◽  
Takeshi Ohta ◽  
Yasufumi Kawasuji ◽  
...  
Keyword(s):  
Light Source ◽  
Euv Lithography ◽  
Laser Produced Plasma
Sign in / Sign up

Export Citation Format

Share Document