Characterization of Optical Coatings with a CCD Angular and Spatial Resolved Scatterometer
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1994 ◽
Vol 12
(5)
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pp. 2808-2813
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1993 ◽
Vol 2
(5-7)
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pp. 694-698
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2004 ◽
Vol 51
(5)
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pp. 2279-2283
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2010 ◽
Vol 19
(2)
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pp. 025011
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