Multiple Scale Modeling of PVD Sputter Processes
1998 ◽
Vol 249
(1-2)
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pp. 62-70
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2010 ◽
Vol 164
(3)
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pp. 338-352
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Keyword(s):
2015 ◽
Vol 32
(3)
◽
pp. 220-226
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Keyword(s):
2007 ◽
Vol 16
(2)
◽
pp. 213-236
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