High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths
2010 ◽
Vol 35
(15)
◽
pp. 2615
◽
Dmitriy L. Voronov
◽
Minseung Ahn
◽
Erik H. Anderson
◽
Rossana Cambie
◽
Chih-Hao Chang
◽
...
2008 ◽
Vol 33
(5)
◽
pp. 485
◽
Hui Lin
◽
Lichao Zhang
◽
Lifeng Li
◽
Chunshui Jin
◽
Hongjun Zhou
◽
...
2006 ◽
Vol 45
(2)
◽
pp. 305
◽
Michael P. Kowalski
◽
William R. Hunter
◽
Troy W. Barbee
JEFFREY S. MORGAN
◽
J. GETHYN TIMOTHY
◽
DAVID C. SLATER
◽
MARTIN C.E. HUBER
◽
GIUSEPPE TONDELLO
◽
...
1995 ◽
Vol 67
(25)
◽
pp. 3685-3687
◽
Mats Hagberg
◽
Niklas Eriksson
◽
Anders Larsson
1993 ◽
Vol 32
(12)
◽
pp. 3121
◽
2004 ◽
Vol 43
(28)
◽
pp. 5323
◽
Patrick P. Naulleau
◽
J. Alexander Liddle
◽
Farhad Salmassi
◽
Erik H. Anderson
◽
Eric M. Gullikson
2006 ◽
Vol 45
(8)
◽
pp. 1676
◽
Michael P. Kowalski
◽
Ralf K. Heilmann
◽
Mark L. Schattenburg
◽
Chih-Hao Chang
◽
Frederick B. Berendse
◽
...
2006 ◽
Vol 77
(10)
◽
pp. 10F305
◽
W. Biel
◽
A. Greiche
◽
R. Burhenn
◽
E. Jourdain
◽
D. Lepere
2010 ◽
Vol 20
(5)
◽
pp. 055028
◽
ChaBum Lee
◽
Tsunemoto Kuriyagawa
◽
Do-Kyun Woo
◽
Sun-Kyu Lee
2007 ◽
Vol 46
(14)
◽
pp. 2581
◽
Patrick P. Naulleau
◽
Farhad Salmassi
◽
Eric M. Gullikson
◽
J. Alexander Liddle