High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region
Keyword(s):
Ion Beam
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2008 ◽
Vol 129
(16)
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pp. 161103
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Keyword(s):
Keyword(s):
2013 ◽
Vol 17
(1)
◽
pp. 38-43
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Keyword(s):