Experimental study of the effects of key parameters for the air beam assisted form error in-process optical measurement method

2011 ◽  
Author(s):  
Jiaxi Wang
Keyword(s):  
Experimental Study ◽  
Measurement Method ◽  
Optical Measurement ◽  
Form Error ◽  
Optical Measurement Method

A new optical measurement method for verifying the exact change of thin films on the QZ blanks with ellipsometer

2009 ◽  
Author(s):  
Songbae Moon ◽  
Seong-Yoon Kim ◽  
Gyung-Yoon Bang ◽  
Byung-Gook Kim ◽  
Sang-Gyun Woo ◽  
...  
Keyword(s):  
Thin Films ◽  
Measurement Method ◽  
Optical Measurement ◽  
Optical Measurement Method

D25 Development of Optical Measurement Method beyond the Diffraction Limit for Microstructures

2014 ◽  
Vol 2014.10 (0) ◽  
pp. 241-242
Author(s):  
Hiromasa KUME ◽  
Hiroki YOKOZEKI ◽  
Ryota KUDO ◽  
Satoru TAKAHASHI ◽  
Kiyoshi TAKAMASU
Keyword(s):  
Measurement Method ◽  
Optical Measurement ◽  
Diffraction Limit ◽  
Optical Measurement Method
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