scholarly journals Challenges in nanometrology: high precision measurement of position and size

2015 ◽  
Vol 82 (7-8) ◽  
Author(s):  
Harald Bosse ◽  
Bernd Bodermann ◽  
Gaoliang Dai ◽  
Jens Flügge ◽  
Carl G. Frase ◽  
...  
Keyword(s):  
High Precision ◽  
Precision Measurement ◽  
High Precision Measurement ◽  
Feature Size ◽  
Traceability Chain ◽  
Transmission Electron ◽  
Recent Approach ◽  
Recent Developments ◽  
On Line ◽  
Nanoscale Features

AbstractRecent developments of the PTB in high precision position and size metrology as support for different nanotechnology applications are described. Measurement uncertainties of 1–2 nm for 1D-position of graduation lines on photomasks, or on line scales and incremental encoders of about 300 mm length have been achieved. The measurement of the size of nanoscale features represents additional challenges, because the location of opposite feature edges needs to be precisely determined. Different feature size or CD metrology techniques are applied at PTB, including a recent approach which uses transmission electron microscopy in the traceability chain of AFM CD measurements. The estimated uncertainty for CD measurements on high quality Si line structures is

Recent developments in automated Transmission Electron MI

1989 ◽  
Vol 47 ◽  
pp. 46-47
Author(s):  
W.J. de Ruijter ◽  
P. Rez ◽  
David J. Smith
Keyword(s):  
Image Analysis ◽  
Computer Image ◽  
Lens Design ◽  
Computer Image Analysis ◽  
Transmission Electron ◽  
Resolution Electron ◽  
Recent Developments ◽  
On Line ◽  
Routine Procedures ◽  
Near Future

There is growing interest in the on-line use of computers in high-resolution electron n which should reduce the demands on highly skilled operators and thereby extend the r of the technique. An on-line computer could obviously perform routine procedures hand, or else facilitate automation of various restoration, reconstruction and enhan These techniques are slow and cumbersome at present because of the need for cai micrographs and off-line processing. In low resolution microscopy (most biologic; primary incentive for automation and computer image analysis is to create a instrument, with standard programmed procedures. In HREM (materials researc computer image analysis should lead to better utilization of the microscope. Instru (improved lens design and higher accelerating voltages) have improved the interpretab the level of atomic dimensions (approximately 1.6 Å) and instrumental resolutior should become feasible in the near future.

High precision measurement of the SOS surface thickness in the rough phase

1991 ◽  
Vol 1 (12) ◽  
pp. 1669-1673 ◽  
Author(s):  
Hans Gerd Evertz ◽  
Martin Hasenbusch ◽  
Mihail Marcu ◽  
Klaus Pinn ◽  
Sorin Solomon
Keyword(s):  
High Precision ◽  
Precision Measurement ◽  
High Precision Measurement ◽  
Surface Thickness

scholarly journals BATCH PROCESSING OF TREE-RING SAMPLES FOR RADIOCARBON ANALYSIS

Radiocarbon ◽  
2020 ◽  
pp. 1-13
Author(s):  
Alexandra Fogtmann-Schulz ◽  
Sabrina G K Kudsk ◽  
Florian Adolphi ◽  
Christoffer Karoff ◽  
Mads F Knudsen ◽  
...  
Keyword(s):  
High Precision ◽  
Tree Rings ◽  
Precision Measurement ◽  
Radiocarbon Dating ◽  
The Other ◽  
High Precision Measurement ◽  
Machine Performance ◽  
High Throughput Method ◽  
Ca 50 ◽  
Low Activity

ABSTRACT We here present a comparison of methods for the pretreatment of a batch of tree rings for high-precision measurement of radiocarbon at the Aarhus AMS Centre (AARAMS), Aarhus University, Denmark. The aim was to develop an efficient and high-throughput method able to pretreat ca. 50 samples at a time. We tested two methods for extracting α-cellulose from wood to find the most optimal for our use. One method used acetic acid, the other used HCl acid for the delignification. The testing was conducted on background 14C samples, in order to assess the effect of the different pretreatment methods on low-activity samples. Furthermore, the extracted wood and cellulose fractions were analyzed using Fourier transform infrared (FTIR) spectroscopy, which showed a successful extraction of α-cellulose from the samples. Cellulose samples were pretreated at AARAMS, and the graphitization and radiocarbon analysis of these samples were done at both AARAMS and the radiocarbon dating laboratory at Lund University to compare the graphitization and AMS machine performance. No significant offset was found between the two sets of measurements. Based on these tests, the pretreatment of tree rings for high-precision radiocarbon analysis at AARAMS will henceforth use HCI for the delignification.

The high precision measurement of 208Pb+208Pb Mott scattering at energies under the Coulomb barrier: the observation of new atomic effects

1995 ◽  
Vol 583 ◽  
pp. 263-267 ◽  
Author(s):  
A. Lépine-Szily ◽  
J.M. Casandjian ◽  
W. Mittig ◽  
A.C.C. Villari ◽  
R. Lichtenthäler Filho ◽  
...  
Keyword(s):  
High Precision ◽  
Precision Measurement ◽  
Coulomb Barrier ◽  
High Precision Measurement ◽  
Mott Scattering

scholarly journals Acrylic target vessels for a high-precision measurement of θ13with the Daya Bay antineutrino detectors

2012 ◽  
Vol 7 (06) ◽  
pp. P06004-P06004 ◽  
Author(s):  
H R Band ◽  
R L Brown ◽  
J Cherwinka ◽  
J Cao ◽  
Y Chang ◽  
...  
Keyword(s):  
High Precision ◽  
Precision Measurement ◽  
Daya Bay ◽  
High Precision Measurement

High precision measurement of silicon in naphthas by ICP-OES using isooctane as diluent

Talanta ◽  
2017 ◽  
Vol 164 ◽  
pp. 563-569 ◽  
Author(s):  
M.F. Gazulla ◽  
M. Rodrigo ◽  
M. Orduña ◽  
M.J. Ventura ◽  
C. Andreu
Keyword(s):  
High Precision ◽  
Precision Measurement ◽  
Icp Oes ◽  
High Precision Measurement
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