Nitrogen Atom Densities in Rare Gas Diluted N2 Plasmas with Capacitive and Inductive Coupling
2008 ◽
Vol 128
(10)
◽
pp. 615-618
◽
2015 ◽
Vol 60
(8)
◽
pp. 757-763
◽
2010 ◽
Vol 130
(12)
◽
pp. 1073-1080