An Analysis of the Heat Transfer for a Micro-Flow Sensor

Satoshi Okano; Shinji Hirano; Hiroyuki Horiguchi

doi:10.1541/ieejsmas.119.38

An Analysis of the Heat Transfer for a Micro-Flow Sensor

IEEJ Transactions on Sensors and Micromachines ◽

10.1541/ieejsmas.119.38 ◽

1999 ◽

Vol 119 (1) ◽

pp. 38-43 ◽

Cited By ~ 1

Author(s):

Satoshi Okano ◽

Shinji Hirano ◽

Hiroyuki Horiguchi

Keyword(s):

Heat Transfer ◽

Flow Sensor ◽

Micro Flow

A silicon micromachined flow sensor using thermopiles for heat transfer measurements

IMTC/2002. Proceedings of the 19th IEEE Instrumentation and Measurement Technology Conference (IEEE Cat. No.00CH37276) ◽

10.1109/imtc.2002.1007142 ◽

2003 ◽

Author(s):

S. Oda ◽

M. Anzai ◽

S. Uematsu ◽

K. Watanabe

Keyword(s):

Heat Transfer ◽

Flow Sensor

Time of Flight Micro Flow Sensor for Aqueous Fluids Using In-Situ Produced Tracer

Transducers ’01 Eurosensors XV ◽

10.1007/978-3-642-59497-7_334 ◽

2001 ◽

pp. 1416-1419 ◽

Cited By ~ 1

Author(s):

Jian Wu ◽

Willy Sansen

Keyword(s):

Time Of Flight ◽

Flow Sensor ◽

Micro Flow

Temperature-Balance Micro Flow Sensor System Based on a Free Oscillating Differential Power Controller

Sensor Technology 2001 ◽

10.1007/978-94-010-0840-2_4 ◽

2001 ◽

pp. 19-24

Author(s):

Theo S. J. Lammerink ◽

Remco J. Wiegerink ◽

Miko C. Elwenspoek

Keyword(s):

Flow Sensor ◽

Sensor System ◽

Power Controller ◽

Micro Flow

Micro-flow sensor for continuous resin fluidity monitoring between fibers

Sensors and Actuators B Chemical ◽

10.1016/j.snb.2018.11.022 ◽

2019 ◽

Vol 282 ◽

pp. 177-186 ◽

Cited By ~ 3

Author(s):

Yongxi He ◽

Yingguang Li ◽

Xiaozhong Hao ◽

Jing zhou ◽

Shuting Liu

Keyword(s):

Flow Sensor ◽

Micro Flow

Coupled electrothermal analysis of a micro flow sensor with control circuit using spice

Electronics and Communications in Japan ◽

10.1002/ecj.10095 ◽

2010 ◽

Vol 93 (1) ◽

pp. 58-64 ◽

Cited By ~ 2

Author(s):

Shoji Kamiunten ◽

Hidetomo Nagayo ◽

Masahiro Motosuke ◽

Shinji Honami

Keyword(s):

Control Circuit ◽

Flow Sensor ◽

Micro Flow

Polymer-based micro flow sensor for dynamical flow measurements in hydraulic systems

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/20/6/064004 ◽

2010 ◽

Vol 20 (6) ◽

pp. 064004 ◽

Cited By ~ 7

Author(s):

R Ahrens ◽

M Festa

Keyword(s):

Flow Sensor ◽

Hydraulic Systems ◽

Flow Measurements ◽

Micro Flow ◽

Dynamical Flow

Analysis of Micro Flow Sensor using Excel Spreadsheet

2006 SICE-ICASE International Joint Conference ◽

10.1109/sice.2006.314615 ◽

2006 ◽

Cited By ~ 1

Author(s):

Tae Kim ◽

Wan-young Chung

Keyword(s):

Flow Sensor ◽

Excel Spreadsheet ◽

Micro Flow

Design of micro flow sensor with optimal detection spacing

SICE Annual Conference 2007 ◽

10.1109/sice.2007.4421402 ◽

2007 ◽

Cited By ~ 1

Author(s):

Tae Yong Kim ◽

Wan-Young Chung

Keyword(s):

Flow Sensor ◽

Optimal Detection ◽

Micro Flow

A New Method for Measuring Flow Velocity Using Periodic Heating and the Sensing Characteristics of a Micro Flow Sensor Manufactured by MEMS Technique

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B ◽

10.1299/kikaib.72.2596 ◽

2006 ◽

Vol 72 (723) ◽

pp. 2596-2603

Author(s):

Yoshimitsu KANAOKA ◽

Shigeo KIMURA ◽

Takahiro KIWATA ◽

Atsushi OKAJIMA ◽

Osamu KIMURA ◽

...

Keyword(s):

Flow Velocity ◽

Flow Sensor ◽

New Method ◽

Periodic Heating ◽

Micro Flow ◽

Sensing Characteristics

Modeling and Numerical Simulation of Gaseous Flows in Micro Geometries

Fluids Engineering ◽

10.1115/imece2003-55023 ◽

2003 ◽

Author(s):

Hong Xue

Keyword(s):

Heat Transfer ◽

Channel Flow ◽

Transition Flow ◽

Gaseous Flow ◽

Rarefied Flow ◽

Flow And Heat Transfer ◽

Transition Flow Regime ◽

Gaseous Flows ◽

Micro Flow ◽

Mechanical Devices

In this paper, our recent work in studying gaseous flow and heat transfer in micro geometries are summarized. Both continuum-based approaches and DSMC method is used to predict characteristics of micro flow in slip and transition flow regime. A new analytic solution for micro channel flow is proposed. The results in micro Couette flow, channel flow and backward facing step flow show that the rarefied flow in micro geometries exhibit unique and complicated behaviors. Our efforts in exploring the flow and heat transfer mechanism for micro gaseous flow are useful in broad engineering applications of micro mechanical devices and system.