scholarly journals A silicon micromachined flow sensor using thermopiles for heat transfer measurements

Author(s):  
S. Oda ◽  
M. Anzai ◽  
S. Uematsu ◽  
K. Watanabe
Keyword(s):  
2012 ◽  
Vol 562-564 ◽  
pp. 1213-1217
Author(s):  
Feng Tian ◽  
Zhen Bin Gao ◽  
Yi Cai Sun

A flow sensor for liquids, based on the principle of fluid-structure heat transfer is presented. The heater and thermistor are integrated and wrapped together as a detector and heat source, allowing heat exchange between the sensor and the fluid. Through numerical simulation, the temperature distribution of the sensor was investigated, under conditions of various flow velocities. The process of turbulent heat transfer in the flow pipe was simulated, the temperature distribution in the sensor was analyzed and compared under different temperature and velocity of the fluid, and the corresponding measuring ranges were determined. The flow detection circuit is designed and the results of water flow velocity tests in the range of (0.01–1)m/s are presented.


1999 ◽  
Vol 119 (1) ◽  
pp. 38-43 ◽  
Author(s):  
Satoshi Okano ◽  
Shinji Hirano ◽  
Hiroyuki Horiguchi
Keyword(s):  

Author(s):  
Junya HARA ◽  
Ken YAMAMOTO ◽  
Shinichi IKE ◽  
Seishi NAKANO ◽  
Masahiro MOTOSUKE

2003 ◽  
Vol 52 (4) ◽  
pp. 1155-1159 ◽  
Author(s):  
S. Oda ◽  
M. Anzai ◽  
S. Uematsu ◽  
K. Watanabe
Keyword(s):  

1989 ◽  
Vol 13 (3) ◽  
pp. 161-173 ◽  
Author(s):  
T. M. Berlicki ◽  
E. Murawski ◽  
S. J. Osadnik ◽  
E. L. Prociòw

Some technological aspects and basic parameters of nickel thin film gas flow sensors are presented. Thermal conditions of sensors are described by the mechanisms of heat transfer. Typical characteristics measured during the sensor operation are given.


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