Transducers ’01 Eurosensors XV
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Published By Springer Berlin Heidelberg

9783540421504, 9783642594977
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

A Tactile Sensor Instantaneously Evaluating Friction Coefficients

2001 ◽  
pp. 1402-1405 ◽  
Author(s):  
Katsuhiko Nakamura ◽  
Hiroyuki Shinoda
Keyword(s):  
Tactile Sensor ◽  
Friction Coefficients

Three-Dimensional Micromachining of Silicon Nitride for Power Microelectromechanical Systems

2001 ◽  
pp. 1112-1115
Author(s):  
Shinya Sugimoto ◽  
Shuji Tanaka ◽  
Jing-Feng Li ◽  
Takashi Genda ◽  
Ryuzo Watanabe ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Microelectromechanical Systems ◽  
Three Dimensional

An Ultra-Thin Hermetic Package Utilizing Electroplated Gold

2001 ◽  
pp. 194-197 ◽  
Author(s):  
Brian H. Stark ◽  
Khalil Najafi
Keyword(s):  
Hermetic Package

Study of Boiling Regimes and Transient Signal Measurements in Microchannels

2001 ◽  
pp. 1486-1489 ◽  
Author(s):  
Lian Zhang ◽  
Jae-Mo Koo ◽  
Linan Jiang ◽  
Kenneth E. Goodson ◽  
Juan G. Santiago ◽  
...  
Keyword(s):  
Transient Signal

A Micromachined Silicon Low-Voltage Parallel-Plate Electrokinetic Pump

2001 ◽  
pp. 892-895 ◽  
Author(s):  
Daniel Laser ◽  
Shuhuai Yao ◽  
Chuan-Hua Chen ◽  
James Mikkelsen ◽  
Kenneth Goodson ◽  
...  
Keyword(s):  
Parallel Plate ◽  
Low Voltage

Dielectric micro-hotplate for integrated sensors: An electro-thermo-mechanical analysis

2001 ◽  
pp. 312-315 ◽  
Author(s):  
J. Puigcorbé ◽  
A. Vilà ◽  
I. Gràcia ◽  
C. Cané ◽  
J. R. Morante
Keyword(s):  
Mechanical Analysis ◽  
Integrated Sensors

Detection of Volatile Compounds Correlated to Human Diseases Through Breath Analysis With Chemical Sensors

2001 ◽  
pp. 1746-1749
Author(s):  
Maximilian Fleischer ◽  
Elfriede Simon ◽  
Eva Rumpel ◽  
Heiko Ulmer ◽  
Mika Harbeck ◽  
...  
Keyword(s):  
Volatile Compounds ◽  
Chemical Sensors ◽  
Breath Analysis ◽  
Human Diseases

New Material for Thin Film Filament of Micromachined Hot-plate

2001 ◽  
pp. 848-851 ◽  
Author(s):  
Arnaud Pollien ◽  
Jacek Baborowski ◽  
Nicolas Ledermann ◽  
Paul Muralt
Keyword(s):  
Thin Film ◽  
Hot Plate ◽  
New Material

An Active Guide Wire With Shape Memory Alloy Bending Actuator Fabricated By Room Temperature Process

2001 ◽  
pp. 698-701 ◽  
Author(s):  
Takashi Mineta ◽  
Toshiaki Mitsui ◽  
Yoshiyuki Watanabe ◽  
Seiya Kobayashi ◽  
Youichi Haga ◽  
...  
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Room Temperature ◽  
Guide Wire ◽  
Bending Actuator

Ultra-Fast Anisotropic Silicon Etching with Resulting Mirror Surfaces in Ammonia Solutions

2001 ◽  
pp. 608-611 ◽  
Author(s):  
Christophe Mihalcea ◽  
Sommawan Khumpuang ◽  
Masashi Kuwahara ◽  
Zhen Yang ◽  
Ryutaro Maeda ◽  
...  
Keyword(s):  
Silicon Etching ◽  
Anisotropic Silicon Etching
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