Preparation and Characterization of Laser Ablation Derived PZT Thin Films for Micro Actuators

2001 ◽  
Vol 121 (3) ◽  
pp. 124-128
Author(s):  
Zhan-Jie Wang ◽  
Wen-Mei Lin ◽  
Ryutaro Maeda
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Pzt Thin Films ◽  
Micro Actuators

scholarly journals Preparation and Characterization of Sol-Gel Derived PZT Thin Films for Micro Actuators

1999 ◽  
Vol 119 (4) ◽  
pp. 254-259 ◽  
Author(s):  
Zhan-jie Wang ◽  
Ryutaro Maeda ◽  
Kikuchi Kaoru
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Pzt Thin Films ◽  
Micro Actuators

Characterization of conduction in PZT thin films produced by laser ablation deposition

1993 ◽  
Vol 3 (4) ◽  
pp. 355-363 ◽  
Author(s):  
X. Chen ◽  
A. I. Kingon ◽  
L. Mantese ◽  
O. Auciello ◽  
K. Y. Hsieh
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Pzt Thin Films

Characterization of Hastelloy thin films deposited by pulsed laser ablation

2002 ◽  
Vol 197-198 ◽  
pp. 343-347 ◽  
Author(s):  
M.F Vignolo ◽  
I Avram ◽  
S Duhalde ◽  
C Morales ◽  
T Pérez ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation

Proposed mechanism for the improvements of PZT thin films deposited by direct-current glow discharge assisted laser ablation

1997 ◽  
Vol 195 (1) ◽  
pp. 203-206
Author(s):  
Lirong Zheng ◽  
Chenglu Lin ◽  
W-Ping Xu ◽  
Shigeng Song ◽  
Shichang Zou ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Glow Discharge ◽  
Direct Current ◽  
Pzt Thin Films

Production and characterization of Nd,Cr:GSGG thin films on Si(001) grown by pulsed laser ablation

2000 ◽  
Vol 70 (4) ◽  
pp. 425-429 ◽  
Author(s):  
P.R. Willmott ◽  
P. Manoravi ◽  
K. Holliday
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation

Characterization of C-N thin films deposited by reactive excimer laser ablation of graphite targets in nitrogen atmosphere

1997 ◽  
Vol 307 (1-2) ◽  
pp. 54-59 ◽  
Author(s):  
A.P. Caricato ◽  
G. Leggieri ◽  
A. Luches ◽  
A. Perrone ◽  
E. Gyorgy ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Excimer Laser ◽  
Nitrogen Atmosphere ◽  
Excimer Laser Ablation
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