Preparation and Properties of Piezoelectric Lead Zirconate Titanate Thin Films for Microsensors and Microactuators by Sol-Gel Processing
1996 ◽
Vol 104
(1207)
◽
pp. 159-163
◽
2006 ◽
pp. 2477-2482
2009 ◽
Vol 113
(1)
◽
pp. 135-139
◽