Scanning Laser Vibrometer for MEMS Control Devices
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2004 ◽
Vol 18
(5)
◽
pp. 1203-1218
◽
2007 ◽
Vol 121
(5)
◽
pp. 2621-2627
◽
2002 ◽
Vol 1
(1)
◽
pp. 63-88
◽
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