scholarly journals Studies on high repetition rate and long life electron beam pumped KrF excimer laser.

1988 ◽  
Vol 16 (1) ◽  
pp. 23-29
Author(s):  
Yoshiyuki KAWAMURA ◽  
Koichi TOYODA
Keyword(s):  
Electron Beam ◽  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Long Life ◽  
Krf Excimer Laser

5 kHz high repetition rate and high power XeCl excimer laser

1995 ◽  
Vol 66 (11) ◽  
pp. 5162-5164 ◽  
Author(s):  
Tatsumi Goto ◽  
Koji Kakizaki ◽  
Shigeyuki Takagi ◽  
Noboru Okamoto ◽  
Saburo Sato ◽  
...  
Keyword(s):  
Excimer Laser ◽  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Xecl Excimer Laser

High-repetition-rate XeC1 Excimer Laser

1994 ◽  
pp. 199-202
Author(s):  
Saburoh Satoh ◽  
Noboru Okamoto ◽  
Kohji Kakizaki ◽  
Shigeyuki Takagi ◽  
Ken Ishikawa ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition

Electron-beam-pumped high-repetition-rate KrF laser system

2000 ◽  
Author(s):  
Eiichi Takahashi ◽  
Isao Okuda ◽  
Yuji Matsumoto ◽  
Isao Matsushima ◽  
Susumu Kato ◽  
...  
Keyword(s):  
Electron Beam ◽  
Repetition Rate ◽  
Laser System ◽  
High Repetition Rate ◽  
High Repetition ◽  
Krf Laser

High-repetition-rate ArF excimer laser for microlithography

2000 ◽  
Author(s):  
Osamu Wakabayashi ◽  
Tatsuo Enami ◽  
Ken Ishii ◽  
Katsutomo Terashima ◽  
Yasuo Itakura ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Arf Excimer Laser
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