scholarly journals Characteristics of Excimer Laser-induced Iron Plasma. Fundamental Research of Materials Processing by Excimer Laser. (Report 1).

1996 ◽  
Vol 14 (3) ◽  
pp. 489-494 ◽  
Author(s):  
Toshihiko Ooie ◽  
Isamu Miyamoto
Keyword(s):  
Excimer Laser ◽  
Materials Processing ◽  
Fundamental Research

Advances In Excimer Laser Materials Processing: An Update

1989 ◽  
Author(s):  
G. Darcy Poulin ◽  
Peter A. Eisele ◽  
Thomas A. Znotins
Keyword(s):  
Excimer Laser ◽  
Materials Processing ◽  
Laser Materials ◽  
Laser Materials Processing

Mask-adapted beam shaping for materials processing with excimer laser radiation

1998 ◽  
Author(s):  
Joerg Bernges ◽  
Lars Unnebrink ◽  
Thomas F. E. Henning ◽  
Ernst W. Kreutiz ◽  
Reinhart Poprawe
Keyword(s):  
Laser Radiation ◽  
Excimer Laser ◽  
Beam Shaping ◽  
Materials Processing ◽  
Excimer Laser Radiation

Excimer-laser-beam homogenization for materials processing

1998 ◽  
Author(s):  
Lars Unnebrink ◽  
Thomas F. E. Henning ◽  
Ernst-Wolfgang Kreutz ◽  
Reinhart Poprawe
Keyword(s):  
Laser Beam ◽  
Excimer Laser ◽  
Materials Processing

scholarly journals A six-beam high-power KrF excimer laser system with energy of 100 J/23 ns

2002 ◽  
Vol 20 (1) ◽  
pp. 123-127 ◽  
Author(s):  
YUSHENG SHAN ◽  
NAIYAN WANG ◽  
JINGLONG MA ◽  
WEIYI MA ◽  
DAWEI YANG ◽  
...  
Keyword(s):  
Excimer Laser ◽  
High Power ◽  
Laser System ◽  
Diagnostic Systems ◽  
Laser Plasma Interaction ◽  
Main Amplifier ◽  
System A ◽  
Beam Output ◽  
Fundamental Research ◽  
Krf Excimer Laser

A six-beam multiplexing master-oscillator-power-amplifier (MOPA) high power KrF excimer laser system has been built at CIAE for fundamental research on laser–plasma interaction. The MOPA system consists of front-end, two-stage KrF amplifiers (preamplifier and main amplifier) pumped by two-side electron beams, an optical angular multiplexing system, a synchronization trigger system, and a controlling-data acquisition system and some diagnostic systems. The total energy of the six-beam output from main amplifier on the target is 100 J/23 ns, the divergence of one beam is 0.2 mrad, the focal spot diameter is 220 μm, and the focal intensity on the target is 1013 W/cm2.

Experiences with an Excimer Laser System for Materials Processing

1992 ◽  
pp. 325-329
Author(s):  
K. Schutte ◽  
H. W. Bergmann ◽  
S. M. Rosiwal ◽  
E. Schubert ◽  
R. Queitsch
Keyword(s):  
Excimer Laser ◽  
Laser System ◽  
Materials Processing

Optical system design for excimer laser materials processing

1999 ◽  
Author(s):  
Lars Unnebrink ◽  
Thomas F. E. Henning ◽  
Ernst-Wolfgang Kreutz ◽  
Reinhart Poprawe
Keyword(s):  
System Design ◽  
Excimer Laser ◽  
Optical System ◽  
Materials Processing ◽  
Laser Materials ◽  
Optical System Design ◽  
Laser Materials Processing
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