Functionalized Cyclohexyl methacrylate based Copolymers for Negative Resist
2011 ◽
Vol 24
(5)
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pp. 535-547
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Keyword(s):
1998 ◽
Vol 199
(10)
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pp. 2301-2310
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1987 ◽
Vol 30
(1)
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pp. 27-30
1991 ◽
Vol 27
(6)
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pp. 501-504
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2003 ◽
Vol 46
(3)
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pp. 613-629
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2015 ◽
Vol 28
(6)
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pp. 769-774
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