scholarly journals Mass Production and Particle Characterization of Fine Spherical Ag Powder by Gas Combustion-Type Spray Pyrolysis

2018 ◽  
Vol 65 (7) ◽  
pp. 414-418
Author(s):  
Shigehiro ARITA ◽  
Takashi OGIHARA ◽  
Masahiro HARADA ◽  
Yasuhiko FURUKAWA
Keyword(s):  
Spray Pyrolysis ◽  
Mass Production ◽  
Particle Characterization ◽  
Gas Combustion

scholarly journals Mass Production and Particle Characterization of Fine Spherical Ag Powder by Gas Combustion-Type Spray Pyrolysis

2017 ◽  
Vol 58 (4) ◽  
pp. 596-599
Author(s):  
Shigehiro Arita ◽  
Takashi Ogihara ◽  
Masahiro Harada ◽  
Yasuhiko Furukawa
Keyword(s):  
Spray Pyrolysis ◽  
Mass Production ◽  
Particle Characterization ◽  
Gas Combustion

Particle characterization of CVD tungsten metallization for 64 MBIT DRAM

1991 ◽  
Vol 49 ◽  
pp. 896-897
Author(s):  
Marylyn Bennett-Lilley ◽  
Thomas T.H. Fu ◽  
David D. Yin ◽  
R. Allen Bowling
Keyword(s):  
Chemical Vapor ◽  
Device Performance ◽  
Particle Characterization ◽  
Particle Generation ◽  
Tungsten Hexafluoride ◽  
Homogeneous Particle ◽  
Multiple Levels ◽  
Circuit Density ◽  
Sources Of Contamination

Chemical Vapor Deposition (CVD) tungsten metallization is used to increase VLSI device performance due to its low resistivity, and improved reliability over other metallization schemes. Because of its conformal nature as a blanket film, CVD-W has been adapted to multiple levels of metal which increases circuit density. It has been used to fabricate 16 MBIT DRAM technology in a manufacturing environment, and is the metallization for 64 MBIT DRAM technology currently under development. In this work, we investigate some sources of contamination. One possible source of contamination is impurities in the feed tungsten hexafluoride (WF6) gas. Another is particle generation from the various reactor components. Another generation source is homogeneous particle generation of particles from the WF6 gas itself. The purpose of this work is to investigate and analyze CVD-W process-generated particles, and establish a particle characterization methodology.

scholarly journals Mass production and characterization of 3-inch PMTs for the JUNO experiment

2021 ◽  
pp. 165347
Author(s):  
Chuanya Cao ◽  
Jilei Xu ◽  
Miao He ◽  
Angel Abusleme ◽  
Mathieu Bongrand ◽  
...  
Keyword(s):  
Mass Production

Single-Particle Characterization of Four “Asian Dust” Samples Collected in Korea, Using Low-ZParticle Electron Probe X-ray Microanalysis

2005 ◽  
Vol 39 (6) ◽  
pp. 1409-1419 ◽  
Author(s):  
Chul-Un Ro ◽  
HeeJin Hwang ◽  
HyeKyeong Kim ◽  
Youngsin Chun ◽  
René Van Grieken
Keyword(s):  
Single Particle ◽  
Electron Probe ◽  
Asian Dust ◽  
Particle Characterization ◽  
X Ray

Deposition and characterization of La2Ti2O7 thin films via spray pyrolysis process

2007 ◽  
Vol 253 (10) ◽  
pp. 4560-4565 ◽  
Author(s):  
D.S. Todorovsky ◽  
R.V. Todorovska ◽  
M.M. Milanova ◽  
D.G. Kovacheva
Keyword(s):  
Thin Films ◽  
Spray Pyrolysis ◽  
Pyrolysis Process ◽  
Spray Pyrolysis Process

Characterization of Srβ-alumina prepared by sol–gel and spray pyrolysis methods

2004 ◽  
Vol 85 (2-3) ◽  
pp. 286-293 ◽  
Author(s):  
G.Paruthimal Kalaignan ◽  
Dae Jong Seo ◽  
Seung Bin Park
Keyword(s):  
Spray Pyrolysis ◽  
Sol Gel
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