Primer on Beam Optics

1993 ◽  
Author(s):  
Charles R. Eminhizer
Keyword(s):  
Beam Optics

A high-current scanning electron microscope with multi-beam optics

2016 ◽  
Vol 159 ◽  
pp. 132-138 ◽  
Author(s):  
Takashi Doi ◽  
Minoru Yamazaki ◽  
Takashi Ichimura ◽  
Yan Ren ◽  
P. Kruit
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
High Current ◽  
Beam Optics ◽  
Scanning Electron

scholarly journals A New High-Throughput Focused MeV Ion-Beam Analysis Setup

Instruments ◽  
2021 ◽  
Vol 5 (1) ◽  
pp. 10
Author(s):  
Sören Möller ◽  
Daniel Höschen ◽  
Sina Kurth ◽  
Gerwin Esser ◽  
Albert Hiller ◽  
...  
Keyword(s):  
Gamma Ray ◽  
Rutherford Backscattering Spectrometry ◽  
Ion Beam ◽  
Complete Analysis ◽  
Nuclear Reaction Analysis ◽  
Beam Optics ◽  
Single Measurement ◽  
Ion Beam Analysis ◽  
Beam Analysis ◽  
Technical Solutions

The analysis of material composition by ion-beam analysis (IBA) is becoming a standard method, similar to electron microscopy. A pool of IBA methods exists, from which the combination of particle-induced-X-ray emission (PIXE), particle induced gamma-ray analysis (PIGE), nuclear-reaction-analysis (NRA), and Rutherford-backscattering-spectrometry (RBS) provides the most complete analysis over the whole periodic table in a single measurement. Yet, for a highly resolved and accurate IBA analysis, a sophisticated technical setup is required integrating the detectors, beam optics, and sample arrangement. A new end-station developed and installed in Forschungszentrum Jülich provides these capabilities in combination with high sample throughput and result accuracy. Mechanical tolerances limit the device accuracy to 3% for RBS. Continuous pumping enables 5*10−8 mbar base pressure with vibration amplitudes < 0.1 µm. The beam optics achieves a demagnification of 24–34, suitable for µ-beam analysis. An in-vacuum manipulator enables scanning 50 × 50 mm² sample areas with 10 nm accuracy. The setup features the above-mentioned IBA detectors, enabling a broad range of analysis applications such as the operando analysis of batteries or the post-mortem analysis of plasma-exposed samples with up to 3000 discrete points per day. Custom apertures and energy resolutions down to 11 keV enable separation of Fe and Cr in RBS. This work presents the technical solutions together with the quantification of these challenges and their success in the form of a technical reference.

Computer Optimization of Electron Guns Using Beam Optics Analysis

2007 ◽  
Author(s):  
Lawrence Ives ◽  
Thuc Bui ◽  
Mike Read ◽  
John David ◽  
Hien Tran
Keyword(s):  
Beam Optics ◽  
Electron Guns ◽  
Computer Optimization
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