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X-ray imaging and spectroscopy of nitrogen in the SiO2/SiC interface of the 4H–SiC MOSFET trench sidewalls
Applied Physics Express
◽
10.35848/1882-0786/ab9ba4
◽
2020
◽
Vol 13
(7)
◽
pp. 071005
Author(s):
Noritake Isomura
◽
Kousuke Kitazumi
◽
Keita Kataoka
◽
Katsuhiro Kutsuki
◽
Yukihiko Watanabe
Keyword(s):
X Ray
◽
X Ray Imaging
◽
Imaging And Spectroscopy
Download Full-text
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