EFFICIENT APPROACH FOR COUPLED ELECTROSTATIC AND STRUCTURAL ANALYSIS OF MEMS VIA BOUNDARY ELEMENT METHOD AND MODAL EXPANSION
Keyword(s):
2013 ◽
Vol 671-674
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pp. 1614-1618
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1990 ◽
Vol 56
(530)
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pp. 2186-2190
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1990 ◽
Vol 56
(527)
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pp. 1703-1708
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Keyword(s):
2021 ◽
Keyword(s):
2008 ◽
Vol 98
(6)
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pp. 3007-3016
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1994 ◽
Vol 60
(572)
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pp. 1094-1099
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2013 ◽
Vol 395-396
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pp. 529-532
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