Period reduction lithography in normal UV range with surface plasmon polaritons interference and hyperbolic metamaterial multilayer structure
2017 ◽
Vol 84
(5)
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pp. 875-879
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2020 ◽
Vol 23
(3)
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pp. 327-331
1996 ◽
Vol 43
(7)
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pp. 1351-1360
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2011 ◽
Vol 181
(3)
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pp. 305
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