Evaluation of damage in InGaZnO4induced by plasma using electron spin resonance measurement
2014 ◽
Vol 53
(3S1)
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pp. 03CB03
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1973 ◽
Vol 77
(5)
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pp. 722-724
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2005 ◽
Vol 39
(4)
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pp. 444-452
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2005 ◽
Vol 232
(1-4)
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pp. 317-321
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2004 ◽
Vol 325
(2-3)
◽
pp. 169-173
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2017 ◽
Vol 39
(3)
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pp. 288-301
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1978 ◽
Vol 74
(0)
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pp. 1963
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