Evaluation of damage in InGaZnO4induced by plasma using electron spin resonance measurement

2014 ◽  
Vol 53 (3S1) ◽  
pp. 03CB03 ◽  
Author(s):  
Tokiyoshi Matsuda ◽  
Daiki Nishimoto ◽  
Kota Takahashi ◽  
Mutsumi Kimura
2011 ◽  
Vol 50 (9R) ◽  
pp. 091301
Author(s):  
Takeshi Ishiyama ◽  
Shutaro Kimura ◽  
Yuya Mori ◽  
Yoichi Kamiura ◽  
Yoshifumi Yamashita

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