In-Situ XPS Study of Etch Chemistry of Methane-Based RIBE of InP Using N2
2015 ◽
Vol 11
(5)
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pp. 769-774
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2018 ◽
Vol 36
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pp. 051401
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2008 ◽
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pp. 227-233
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2015 ◽
Vol 64
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pp. 2780-2785
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Vol 435
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