Uniaxial Tensile Testing System for Quantitative Stress Analysis in Silicon Oxide Thin Films by Cathodoluminescence Spectroscopy

2009 ◽  
Author(s):  
N. Goami ◽  
N. Yamashita ◽  
N. Araki ◽  
S. Kakinuma ◽  
K. Nishikata ◽  
...  
2001 ◽  
Author(s):  
M. A. Haque ◽  
M. T. A. Saif

Abstract We present a MEMS-based technique for in-situ uniaxial tensile testing of freestanding thin films inside SEM and TEM. It integrates a freestanding thin film specimen with MEMS force sensors and structures to produce an on-chip tensile testing facility. Cofabrication of the specimen with force and displacement measuring mechanisms produces the following unique features: 1) Quantitative experimentation can be carried out in both SEM and TEM, 2) No extra gripping mechanism is required, 3) Specimen misalignment can be eliminated, 4) Pre-stress in specimen can be determined, and 5) Specimens with micrometer to nanometer thickness can be tested. We demonstrate the technique by testing a 200-nanometer thick Aluminum specimen in-situ in SEM. Significant strengthening and anelasticity were observed at this size scale.


1997 ◽  
Vol 26 (10) ◽  
pp. 995-996 ◽  
Author(s):  
Isao Hasegawa ◽  
Koji Shibusa ◽  
Satoshi Kobayashi ◽  
Shuichi Nonomura ◽  
Shoji Nitta

2002 ◽  
Vol 62 (1) ◽  
pp. 73-81 ◽  
Author(s):  
J. M. García Páez ◽  
A. Carrera ◽  
E. Jorge Herrero ◽  
I. Millán ◽  
A. Rocha ◽  
...  

1993 ◽  
Vol 234 (1-2) ◽  
pp. 337-341 ◽  
Author(s):  
M. Weidner ◽  
A. Röseler ◽  
M. Eichler

2000 ◽  
Author(s):  
T. Jesse Lim ◽  
Wei-Yang Lu

Abstract In this work, uniaxial tensile testing of a 63Sn-37Pb alloy with different specimen sizes and aging conditions had been carried out. Although the stress-strain responses of different specimen sizes and aging conditions differs, the ultimate strength of the specimens with 16 hours, 100°C aging are similar for the sizes tested. The specimens with 25 days, 100°C aging have different stress-strain response with different sizes, and have a lower ultimate strength and higher failure strain compared to 16 hours, 100°C aging specimens.


ChemInform ◽  
2010 ◽  
Vol 24 (41) ◽  
pp. no-no
Author(s):  
C.-M. CHIANG ◽  
B. R. ZEGARSKI ◽  
L. H. DUBOIS

Sign in / Sign up

Export Citation Format

Share Document