multidirectional uv lithography
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Multidirectional UV lithography via inclined/rotated mirrors for liquid materials

Applied Physics Express ◽

10.35848/1882-0786/ab9656 ◽

2020 ◽

Vol 13 (7) ◽

pp. 076502

Author(s):

Takumi Sugimito ◽

Hidetoshi Takahashi

Keyword(s):

Uv Lithography ◽

Multidirectional Uv Lithography

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Fabrication of 3D nanostructures by multidirectional UV lithography and predictive structural modeling

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/25/2/025017 ◽

2015 ◽

Vol 25 (2) ◽

pp. 025017 ◽

Author(s):

Jungkwun Kim ◽

Cheolbok Kim ◽

Mark G Allen ◽

Yong-Kyu ‘YK’ Yoon

Keyword(s):

Structural Modeling ◽

Uv Lithography ◽

3D Nanostructures ◽

Multidirectional Uv Lithography

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Three dimensional nanoscale fabrication and modeling of dynamic mode multidirectional UV lithography

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/transducers.2011.5969804 ◽

2011 ◽

Author(s):

Jungkwun Kim ◽

Xiaoyu Cheng ◽

David E. Senior ◽

Mark G. Allen ◽

Yong-Kyu Yoon

Keyword(s):

Three Dimensional ◽

Dynamic Mode ◽

Uv Lithography ◽

Nanoscale Fabrication ◽

Multidirectional Uv Lithography

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Computer-controlled dynamic mode multidirectional UV lithography for 3D microfabrication

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/21/3/035003 ◽

2011 ◽

Vol 21 (3) ◽

pp. 035003 ◽

Author(s):

Jungkwun Kim ◽

Mark G Allen ◽

Yong-Kyu Yoon

Keyword(s):

Dynamic Mode ◽

Uv Lithography ◽

Computer Controlled ◽

Multidirectional Uv Lithography

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Adjustable Refractive Index Method for Complex Microstructures by Automated Dynamic Mode Multidirectional UV Lithography

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805487 ◽

2009 ◽

Author(s):

Jungkwun Kim ◽

Tae-Soon Yun ◽

Hongsub Jee ◽

Yong Kyu Yoon

Keyword(s):

Refractive Index ◽

Dynamic Mode ◽

Index Method ◽

Uv Lithography ◽

Multidirectional Uv Lithography

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Automated dynamic mode multidirectional UV lithography for complex 3-D microstructures

2008 IEEE 21st International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2008.4443677 ◽

2008 ◽

Author(s):

Jungkwun Kim ◽

Mark G. Allen ◽

Yong-Kyu Yoon

Keyword(s):

Dynamic Mode ◽

Uv Lithography ◽

Multidirectional Uv Lithography

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Multidirectional UV Lithography for Complex 3-D MEMS Structures

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2006.879669 ◽

2006 ◽

Vol 15 (5) ◽

pp. 1121-1130 ◽

Author(s):

Y.-K. Yoon ◽

J.-H. Park ◽

M.G. Allen

Keyword(s):

Uv Lithography ◽

Multidirectional Uv Lithography

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