2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
Latest Publications

TOTAL DOCUMENTS

291

(FIVE YEARS 0)

H-INDEX

(FIVE YEARS 0)

Published By IEEE

9781424429776

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Adjustable Refractive Index Method for Complex Microstructures by Automated Dynamic Mode Multidirectional UV Lithography

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805487 ◽

2009 ◽

Cited By ~ 3

Author(s):

Jungkwun Kim ◽

Tae-Soon Yun ◽

Hongsub Jee ◽

Yong Kyu Yoon

Keyword(s):

Refractive Index ◽

Dynamic Mode ◽

Index Method ◽

Uv Lithography ◽

Multidirectional Uv Lithography

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In-Plane Bandpass Regulation Check Valve in Heat-Shrink Packaging for Drug Delivery

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805362 ◽

2009 ◽

Cited By ~ 8

Author(s):

R. Lo ◽

E. Meng

Keyword(s):

Drug Delivery ◽

Check Valve

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A Micromachined Thermo-Optic Tunable Laser

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805561 ◽

2009 ◽

Cited By ~ 2

Author(s):

H. Cai ◽

B. Liu ◽

X. M. Zhang ◽

W. M. Zhu ◽

J. Tamil ◽

...

Keyword(s):

Tunable Laser

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Direct Wire-Bonding of Silicon Devices Without Metal Pads

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805493 ◽

2009 ◽

Cited By ~ 1

Author(s):

A. Hirshberg ◽

D. Elata

Keyword(s):

Wire Bonding ◽

Silicon Devices

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A Flexible Regeneration Microelectrode with Cell-Growth Guidance

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805367 ◽

2009 ◽

Cited By ~ 1

Author(s):

Riho Gojo ◽

Naoki Kotake ◽

Takafumi Suzuki ◽

Kunihiko Mabuchi ◽

Shoji Takeuchi

Keyword(s):

Cell Growth ◽

Growth Guidance

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Mechanical Characterization of Biomolecules in Liquid using Silicon Tweezers with Subnanonewton Resolution

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805455 ◽

2009 ◽

Cited By ~ 4

Author(s):

C. Yamahata ◽

E. Sarajlic ◽

L. Jalabert ◽

M. Kumemura ◽

D. Collard ◽

...

Keyword(s):

Mechanical Characterization

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Resonant Piezoelectric ALGaN/GaN MEMS Sensors in Longitudinal Mode Operation

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805536 ◽

2009 ◽

Cited By ~ 2

Author(s):

K. Brueckner ◽

F. Niebelschuetz ◽

K. Tonisch ◽

R. Stephan ◽

V. Cimalla ◽

...

Keyword(s):

Longitudinal Mode ◽

Mems Sensors ◽

Mode Operation

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Electrostatic Rotary Stepper Micromotor for Skew Angle Compensation in Hard Disk Drive

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805574 ◽

2009 ◽

Cited By ~ 5

Author(s):

E. Sarajlic ◽

C. Yamahata ◽

M. Cordero ◽

H. Fujita

Keyword(s):

Hard Disk Drive ◽

Hard Disk ◽

Disk Drive ◽

Skew Angle

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Design and Fabrication of a Gaussian-Shaped AT-Cut Quartz Crystal Resonator

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805531 ◽

2009 ◽

Cited By ~ 6

Author(s):

T. Abe ◽

H. Kishi

Keyword(s):

Quartz Crystal ◽

Quartz Crystal Resonator ◽

Crystal Resonator

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Electrodeposition of Permalloy in Deep Silicon Trenches Without Edge-Overgrowth Utilizing Dry Film Photoresist

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805476 ◽

2009 ◽

Cited By ~ 2

Author(s):

Sang-Won Park ◽

Debbie G. Senesky ◽

Albert P. Pisano

Keyword(s):

Silicon Trenches ◽

Dry Film ◽

Dry Film Photoresist

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2009 IEEE 22nd International Conference on Micro Electro Mechanical SystemsLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Adjustable Refractive Index Method for Complex Microstructures by Automated Dynamic Mode Multidirectional UV Lithography

In-Plane Bandpass Regulation Check Valve in Heat-Shrink Packaging for Drug Delivery

A Micromachined Thermo-Optic Tunable Laser

Direct Wire-Bonding of Silicon Devices Without Metal Pads

A Flexible Regeneration Microelectrode with Cell-Growth Guidance

Mechanical Characterization of Biomolecules in Liquid using Silicon Tweezers with Subnanonewton Resolution

Resonant Piezoelectric ALGaN/GaN MEMS Sensors in Longitudinal Mode Operation

Electrostatic Rotary Stepper Micromotor for Skew Angle Compensation in Hard Disk Drive

Design and Fabrication of a Gaussian-Shaped AT-Cut Quartz Crystal Resonator

Electrodeposition of Permalloy in Deep Silicon Trenches Without Edge-Overgrowth Utilizing Dry Film Photoresist

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
Latest Publications