2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
Latest Publications

TOTAL DOCUMENTS

291

(FIVE YEARS 0)

H-INDEX

13

(FIVE YEARS 0)

Published By IEEE

9781424429776

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Electrostatic Rotary Stepper Micromotor for Skew Angle Compensation in Hard Disk Drive

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805574 ◽

2009 ◽

Author(s):

E. Sarajlic ◽

C. Yamahata ◽

M. Cordero ◽

H. Fujita

Keyword(s):

Hard Disk Drive ◽

Hard Disk ◽

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Design and Fabrication of a Gaussian-Shaped AT-Cut Quartz Crystal Resonator

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805531 ◽

2009 ◽

Author(s):

T. Abe ◽

H. Kishi

Keyword(s):

Quartz Crystal ◽

Quartz Crystal Resonator ◽

Crystal Resonator

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Electrodeposition of Permalloy in Deep Silicon Trenches Without Edge-Overgrowth Utilizing Dry Film Photoresist

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805476 ◽

2009 ◽

Author(s):

Sang-Won Park ◽

Debbie G. Senesky ◽

Albert P. Pisano

Keyword(s):

Silicon Trenches ◽

Dry Film ◽

Dry Film Photoresist

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Topology Optimization for Micro Rotational Mirror Design and Safe Manufacturing

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805559 ◽

2009 ◽

Author(s):

T. Chen ◽

Z. Liu ◽

J. G. Korvink ◽

S. Krausse ◽

U. Wallrabe

Keyword(s):

Topology Optimization

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Ultra-Compact Integration for Fully-Implantable Neural Microsystems

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805360 ◽

2009 ◽

Author(s):

G.E. Perlin ◽

K.D. Wise

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In-Plane Bandpass Regulation Check Valve in Heat-Shrink Packaging for Drug Delivery

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805362 ◽

2009 ◽

Author(s):

R. Lo ◽

E. Meng

Keyword(s):

Drug Delivery ◽

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A Micromachined Thermo-Optic Tunable Laser

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805561 ◽

2009 ◽

Author(s):

H. Cai ◽

B. Liu ◽

X. M. Zhang ◽

W. M. Zhu ◽

J. Tamil ◽

...

Keyword(s):

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Direct Wire-Bonding of Silicon Devices Without Metal Pads

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805493 ◽

2009 ◽

Author(s):

A. Hirshberg ◽

D. Elata

Keyword(s):

Wire Bonding ◽

Silicon Devices

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A Flexible Regeneration Microelectrode with Cell-Growth Guidance

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805367 ◽

2009 ◽

Author(s):

Riho Gojo ◽

Naoki Kotake ◽

Takafumi Suzuki ◽

Kunihiko Mabuchi ◽

Shoji Takeuchi

Keyword(s):

Cell Growth ◽

Growth Guidance

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Mechanical Characterization of Biomolecules in Liquid using Silicon Tweezers with Subnanonewton Resolution

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems ◽

10.1109/memsys.2009.4805455 ◽

2009 ◽

Author(s):

C. Yamahata ◽

E. Sarajlic ◽

L. Jalabert ◽

M. Kumemura ◽

D. Collard ◽

...

Keyword(s):

Mechanical Characterization

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