Research of Powder Blasting Based Ona New Type PDMS Mask

This paper presents an efficient molding technology to fabricate PDMS mask with the help of precision cutting process. At the same time, we have studied the influence of major parameters on the effect of glass erosion rate in powder blasting process. Preliminary results indicate that particledimension and mask opening size can have a decisive influence on the erosion rate. The mask molding technology we have referred can meet the requirement of etching vias through the depth of 500μmglass substrate. Different etching modes can formdifferenthole structures which is suitable for different MEMS devices, enriching elaborate processing technologyfor glass.