Microsystems and Nanosystems - Piezoelectric MEMS Resonators
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16

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3

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Published By Springer International Publishing

9783319286860, 9783319286884

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BAW Piezoelectric Resonators

Microsystems and Nanosystems - Piezoelectric MEMS Resonators ◽

10.1007/978-3-319-28688-4_8 ◽

2017 ◽

pp. 203-220 ◽

Author(s):

Ken-ya Hashimoto

Keyword(s):

Piezoelectric Resonators

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High Frequency Oscillators for Mobile Devices

Microsystems and Nanosystems - Piezoelectric MEMS Resonators ◽

10.1007/978-3-319-28688-4_15 ◽

2017 ◽

pp. 335-385 ◽

Author(s):

Jan H. Kuypers

Keyword(s):

Mobile Devices ◽

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Gallium Nitride for M/NEMS

Microsystems and Nanosystems - Piezoelectric MEMS Resonators ◽

10.1007/978-3-319-28688-4_3 ◽

2017 ◽

pp. 73-98

Author(s):

Mina Rais-Zadeh ◽

Dana Weinstein

Keyword(s):

Gallium Nitride

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AlN Thin Film Processing and Basic Properties

Microsystems and Nanosystems - Piezoelectric MEMS Resonators ◽

10.1007/978-3-319-28688-4_1 ◽

2017 ◽

pp. 3-37 ◽

Author(s):

Paul Muralt

Keyword(s):

Thin Film ◽

Basic Properties ◽

Film Processing ◽

Thin Film Processing

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Laterally Vibrating Piezoelectric MEMS Resonators

Microsystems and Nanosystems - Piezoelectric MEMS Resonators ◽

10.1007/978-3-319-28688-4_7 ◽

2017 ◽

pp. 175-202 ◽

Author(s):

Matteo Rinaldi

Keyword(s):

Mems Resonators ◽

Piezoelectric Mems

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Computational Modeling Challenges

Microsystems and Nanosystems - Piezoelectric MEMS Resonators ◽

10.1007/978-3-319-28688-4_11 ◽

2017 ◽

pp. 257-279

Author(s):

Mattan Kamon

Keyword(s):

Computational Modeling

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Lithium Niobate for M/NEMS Resonators

Microsystems and Nanosystems - Piezoelectric MEMS Resonators ◽

10.1007/978-3-319-28688-4_4 ◽

2017 ◽

pp. 99-129 ◽

Author(s):

Songbin Gong

Keyword(s):

Lithium Niobate

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Quality Factor and Coupling in Piezoelectric MEMS Resonators

Microsystems and Nanosystems - Piezoelectric MEMS Resonators ◽

10.1007/978-3-319-28688-4_5 ◽

2017 ◽

pp. 133-152 ◽

Author(s):

Reza Abdolvand ◽

Hedy Fatemi ◽

Sina Moradian

Keyword(s):

Quality Factor ◽

Mems Resonators ◽

Piezoelectric Mems

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Lead Zirconate Titanate (PZT) for M/NEMS

Microsystems and Nanosystems - Piezoelectric MEMS Resonators ◽

10.1007/978-3-319-28688-4_2 ◽

2017 ◽

pp. 39-71 ◽

Author(s):

Ronald G. Polcawich ◽

Jeffrey S. Pulskamp

Keyword(s):

Lead Zirconate Titanate ◽

Lead Zirconate ◽

Zirconate Titanate

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Flexural Piezoelectric Resonators

Microsystems and Nanosystems - Piezoelectric MEMS Resonators ◽

10.1007/978-3-319-28688-4_6 ◽

2017 ◽

pp. 153-173 ◽

Author(s):

David Horsley ◽

Yipeng Lu ◽

Ofer Rozen

Keyword(s):

Piezoelectric Resonators

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