Silicon Integrated Circuits
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Published By Elsevier

9780120029600

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Author Index

Silicon Integrated Circuits ◽

10.1016/b978-0-12-002960-0.50009-1 ◽

1985 ◽

pp. 337-347

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Physics of VLSI Processing and Process Simulation

Silicon Integrated Circuits ◽

10.1016/b978-0-12-002960-0.50008-x ◽

1985 ◽

pp. 119-336

Author(s):

W. FICHTNER

Keyword(s):

Process Simulation

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Subject Index

Silicon Integrated Circuits ◽

10.1016/b978-0-12-002960-0.50010-8 ◽

1985 ◽

pp. 349-359

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Transient Thermal Processing of Silicon

Silicon Integrated Circuits ◽

10.1016/b978-0-12-002960-0.50006-6 ◽

1985 ◽

pp. 1-73 ◽

Author(s):

G.K. CELLER ◽

T.E. SEIDEL

Keyword(s):

Thermal Processing ◽

Transient Thermal

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List of Contributors

Silicon Integrated Circuits ◽

10.1016/b978-0-12-002960-0.50004-2 ◽

1985 ◽

pp. vii

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Applied Solid State Science

Silicon Integrated Circuits ◽

10.1016/b978-0-12-002960-0.50001-7 ◽

1985 ◽

pp. ii

Keyword(s):

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Reactive Ion-Beam Etching and Plasma Deposition Techniques Using Electron Cyclotron Resonance Plasmas

Silicon Integrated Circuits ◽

10.1016/b978-0-12-002960-0.50007-8 ◽

1985 ◽

pp. 75-117

Author(s):

SEITARO MATSUO

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Deposition ◽

Ion Beam ◽

Electron Cyclotron ◽

Ion Beam Etching ◽

Deposition Techniques ◽

Reactive Ion Beam Etching

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Front Matter

Silicon Integrated Circuits ◽

10.1016/b978-0-12-002960-0.50002-9 ◽

1985 ◽

pp. iii

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Preface

Silicon Integrated Circuits ◽

10.1016/b978-0-12-002960-0.50005-4 ◽

1985 ◽

pp. ix-x

Author(s):

Dawon Kahng

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Copyright

Silicon Integrated Circuits ◽

10.1016/b978-0-12-002960-0.50003-0 ◽

1985 ◽

pp. iv

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