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2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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87
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Published By IEEE
9781728158761
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Latest Documents
Most Cited Documents
Contributed Authors
Related Sources
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Advanced Process Control (APC) for Selective EPI process in 300mm Fab
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
◽
10.1109/asmc49169.2020.9185340
◽
2020
◽
Author(s):
Hongying Peng
◽
Jonathan Caruso
◽
Dinesh Balasubra Manian
◽
Shiladitya Chakravorty
◽
Ryan Mickelson
◽
...
Keyword(s):
Process Control
◽
Advanced Process Control
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Effect of Sparse or Asymmetric Sampling on the Estimation of Photolithography Overlay Regression Parameters
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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10.1109/asmc49169.2020.9185229
◽
2020
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Author(s):
Tim Conway
Keyword(s):
Regression Parameters
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PMOS SiGe epitaxial growth process improvement to increase Yield and Throughput
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
◽
10.1109/asmc49169.2020.9185259
◽
2020
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Author(s):
Vikas K Kaushal
◽
Rakesh C Mahadevapuram
◽
Guozhen Yue
◽
Arvind Raviswaran
Keyword(s):
Epitaxial Growth
◽
Process Improvement
◽
Growth Process
Download Full-text
Estimation of Process Time Delay between Chamber Measurements and Optical Emission Spectroscopy : APC: Advanced Process Control
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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10.1109/asmc49169.2020.9185298
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2020
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Author(s):
Taikang Ning
◽
C.H. Huang
◽
J.A. Jensen
◽
V. Wong
◽
H. Chan
Keyword(s):
Time Delay
◽
Process Control
◽
Emission Spectroscopy
◽
Optical Emission Spectroscopy
◽
Optical Emission
◽
Process Time
◽
Advanced Process Control
◽
Chamber Measurements
Download Full-text
NextGen Calibration Utility for Tool Setup and Matching in Real-Time Automated Visual Inspection Systems
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
◽
10.1109/asmc49169.2020.9185401
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2020
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Author(s):
Chris Edwards
◽
Cody L. Morgan
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John Rudolph
◽
Danniel Slinker
◽
Debashis Panda
Keyword(s):
Real Time
◽
Visual Inspection
◽
Automated Visual Inspection
◽
Inspection Systems
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Dimensional Control of Line Gratings by Small Angle X-Ray Scattering: Shape and Roughness Extraction
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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10.1109/asmc49169.2020.9185351
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2020
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Author(s):
Jerome Reche
◽
Yoann Blancquaert
◽
Guillaume Freychet
◽
Patrice Gergaud
◽
Maxime Besacier
Keyword(s):
Small Angle
◽
Dimensional Control
◽
X Ray
◽
X Ray Scattering
◽
Ray Scattering
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Polysilicon Fuse Electrical Voiding Mechanism AP/DFM: Advanced Patterning / Design for Manufacturability
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
◽
10.1109/asmc49169.2020.9185389
◽
2020
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Author(s):
Gang Liu
◽
Rommel Relos
◽
Bohumil Janik
◽
Robert Davis
◽
Tracy Myers
◽
...
Keyword(s):
Design For Manufacturability
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Creative Use of Vector Scan for Efficient SRAM Inspection
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
◽
10.1109/asmc49169.2020.9185264
◽
2020
◽
Author(s):
Oliver D. Patterson
◽
Hsiao-Chi Peng
◽
Haokun Hu
◽
Chih-Chung Huang
◽
Panneer S. Venkatachalam
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Trace Data Analytics with Knowledge Distillation : DM: Big Data Management and Mining
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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10.1109/asmc49169.2020.9185292
◽
2020
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Author(s):
Janghwan Lee
◽
Wei Xiong
◽
Wonhyouk Jang
Keyword(s):
Big Data
◽
Data Management
◽
Data Analytics
◽
Trace Data
◽
Knowledge Distillation
Download Full-text
Output Improvement in High Volume Memory Fabs by Reducing Recipe Qualifications
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
◽
10.1109/asmc49169.2020.9185365
◽
2020
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Author(s):
Chris Keith
◽
Ace Chen
◽
Haim Albalak
◽
Maryam Anvar
Keyword(s):
High Volume
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