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Extreme Ultraviolet (EUV) Lithography XI
Latest Publications
TOTAL DOCUMENTS
56
(FIVE YEARS 56)
H-INDEX
2
(FIVE YEARS 2)
Published By SPIE
9781510634138, 9781510634145
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Latest Documents
Most Cited Documents
Contributed Authors
Related Sources
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ASML EUV Pioneers Photo Montage
Extreme Ultraviolet (EUV) Lithography XI
◽
10.1117/12.2580464
◽
2020
◽
Download Full-text
An application study on the stochastic effect of EUV photons (Conference Presentation)
Extreme Ultraviolet (EUV) Lithography XI
◽
10.1117/12.2553319
◽
2020
◽
Author(s):
Jongsu Kim
◽
Hyekyoung Jue
◽
Hyungju Ryu
◽
Sang-Jin Kim
◽
Joon-Soo Park
◽
...
Keyword(s):
Application Study
◽
Stochastic Effect
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Extending EUV lithography for DRAM applications
Extreme Ultraviolet (EUV) Lithography XI
◽
10.1117/12.2552067
◽
2020
◽
Cited By ~ 1
Author(s):
Gijsbert Rispens
◽
Claire Van Lare
◽
Dorothe Oorschot
◽
Rik Hoefnagels
◽
Shih-Hsiang Liu
◽
...
Keyword(s):
Euv Lithography
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Modeling photon, electron, and chemical interactions in a model hafnium oxide nanocluster EUV photoresist
Extreme Ultraviolet (EUV) Lithography XI
◽
10.1117/12.2552837
◽
2020
◽
Author(s):
Patrick Theofanis
◽
James M. Blackwell
◽
Marie E. Krysak
◽
Florian Gstrein
Keyword(s):
Hafnium Oxide
◽
Chemical Interactions
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Defect improvement for an EUV process
Extreme Ultraviolet (EUV) Lithography XI
◽
10.1117/12.2552918
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2020
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Author(s):
Masahiko Harumoto
◽
Harold W. Stokes
◽
Shu Hao Chang
◽
Moeen Ghafoor
◽
Brian Cardineau
◽
...
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Progress in EUV resists status towards high-NA EUV lithography
Extreme Ultraviolet (EUV) Lithography XI
◽
10.1117/12.2551886
◽
2020
◽
Cited By ~ 1
Author(s):
Xiaolong Wang
◽
Li-Ting Tseng
◽
Timothee Allenet
◽
Iacopo Mochi
◽
Michaela Vockenhuber
◽
...
Keyword(s):
Euv Lithography
Download Full-text
A toast to Lithography's past: what we learned from technologies not used in HVM (Conference Presentation)
Extreme Ultraviolet (EUV) Lithography XI
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10.1117/12.2572272
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2020
◽
Author(s):
Chris A. Mack
◽
Harry J. Levinson
Download Full-text
EUV Lithography Perspective: from the beginning to HVM (Conference Presentation)
Extreme Ultraviolet (EUV) Lithography XI
◽
10.1117/12.2572271
◽
2020
◽
Author(s):
Nelson M. Felix
◽
David T. Attwood
Keyword(s):
Euv Lithography
Download Full-text
Intersecting the Quantum Future and the Semiconductor Industry (Conference Presentation)
Extreme Ultraviolet (EUV) Lithography XI
◽
10.1117/12.2572270
◽
2020
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Author(s):
Bryan M. Barnes
◽
Erik R. Hosler
◽
R. Joseph Kline
Keyword(s):
Semiconductor Industry
◽
Industry Conference
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Quantitative phase imaging of EUV masks
Extreme Ultraviolet (EUV) Lithography XI
◽
10.1117/12.2553133
◽
2020
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Author(s):
Ryan H. Miyakawa
◽
Stuart Sherwin
◽
Wenhua Zhu
◽
Markus Benk
◽
Patrick Naulleau
Keyword(s):
Phase Imaging
◽
Quantitative Phase Imaging
◽
Quantitative Phase
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