The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.

2005 ◽

Cited By ~ 2

Author(s):

J. Kuntner ◽

F. Kohl ◽

B. Jakoby

Keyword(s):

Thermal Conductivity ◽

Liquid Phase ◽

Conductivity Sensor

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Micromachined probe array for measurement of biological properties

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1497302 ◽

2005 ◽

Author(s):

Jung-Mu Kim ◽

Dong Hoon Oh ◽

Chang-Wook Baek ◽

Jei-Won Cho ◽

Youngwoo Kwon ◽

...

Keyword(s):

Biological Properties ◽

Probe Array

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Effect of gas flow ratio in PE-CVD on elastic properties of sub-micron thick silicon nitride films for MEMS

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1496550 ◽

2005 ◽

Author(s):

Y. Isono ◽

T. Namazu ◽

Y. Saito ◽

A. Yamaguchi ◽

N. Fukushima

Keyword(s):

Silicon Nitride ◽

Elastic Properties ◽

Gas Flow ◽

Flow Ratio ◽

Silicon Nitride Films ◽

Gas Flow Ratio

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Temperature distribution measurement on micro-thermo device for single bionjolecular observation using fluorescent dye

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1497411 ◽

2005 ◽

Author(s):

H.F. Arata ◽

C. Bergaud ◽

H. Noji ◽

S. Takeuchi ◽

H. Fujita

Keyword(s):

Temperature Distribution ◽

Fluorescent Dye ◽

Distribution Measurement ◽

Temperature Distribution Measurement

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Proposal of a new magneto-transistor with a recombination region in the base of the bipolar transistor

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1496462 ◽

2005 ◽

Author(s):

M. Kimura ◽

Sin Takahashi

Keyword(s):

Bipolar Transistor ◽

Recombination Region

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Self-focusing chips for size-dependent DNA separation in nonuniformly distributed asymmetric electric fields

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1497395 ◽

2005 ◽

Cited By ~ 1

Author(s):

Soyeon Yi ◽

Kyoung-Sun Seo ◽

Young-Ho Cho

Keyword(s):

Electric Fields ◽

Dna Separation ◽

Size Dependent ◽

Self Focusing

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Mechanically reliable MEMS variable capacitor using single crystalline silicon (SCS) structure

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1496643 ◽

2005 ◽

Author(s):

Jong-Man Kim ◽

Sanghyo Lee ◽

Jung-Mu Kim ◽

Chang-Wook Baek ◽

Youngwoo Kwon ◽

...

Keyword(s):

Crystalline Silicon ◽

Single Crystalline Silicon ◽

Single Crystalline ◽

Variable Capacitor

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A micromachined polyueethane/stainless-steel capacitive pressure sensor without cavity and diaphragm

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1496459 ◽

2005 ◽

Author(s):

K. Takahata ◽

Y.B. Gianchandani

Keyword(s):

Stainless Steel ◽

Pressure Sensor ◽

Capacitive Pressure Sensor

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A contour-lithography method for rapid and precise deep-etched nano-MEMS structure fabrication

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1497355 ◽

2005 ◽

Cited By ~ 1

Author(s):

M. Kubota ◽

Y. Mita ◽

K. Ito ◽

F. Marty ◽

T. Bourouina ◽

...

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Particle cytometer utilizing rotating flexural plate modes and capacitive sensing

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1496490 ◽

2005 ◽

Author(s):

A. Sathaye ◽

A. Lal

Keyword(s):

Capacitive Sensing

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The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Micromachined thermal conductivity sensor for the liquid phase

Micromachined probe array for measurement of biological properties

Effect of gas flow ratio in PE-CVD on elastic properties of sub-micron thick silicon nitride films for MEMS

Temperature distribution measurement on micro-thermo device for single bionjolecular observation using fluorescent dye

Proposal of a new magneto-transistor with a recombination region in the base of the bipolar transistor

Self-focusing chips for size-dependent DNA separation in nonuniformly distributed asymmetric electric fields

Mechanically reliable MEMS variable capacitor using single crystalline silicon (SCS) structure

A micromachined polyueethane/stainless-steel capacitive pressure sensor without cavity and diaphragm

A contour-lithography method for rapid and precise deep-etched nano-MEMS structure fabrication

Particle cytometer utilizing rotating flexural plate modes and capacitive sensing

Export Citation Format

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Micromachined thermal conductivity sensor for the liquid phase

Micromachined probe array for measurement of biological properties

Effect of gas flow ratio in PE-CVD on elastic properties of sub-micron thick silicon nitride films for MEMS

Temperature distribution measurement on micro-thermo device for single bionjolecular observation using fluorescent dye

Proposal of a new magneto-transistor with a recombination region in the base of the bipolar transistor

Self-focusing chips for size-dependent DNA separation in nonuniformly distributed asymmetric electric fields

Mechanically reliable MEMS variable capacitor using single crystalline silicon (SCS) structure

A micromachined polyueethane/stainless-steel capacitive pressure sensor without cavity and diaphragm

A contour-lithography method for rapid and precise deep-etched nano-MEMS structure fabrication

Particle cytometer utilizing rotating flexural plate modes and capacitive sensing

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
Latest Publications