Micromachining
Latest Publications

TOTAL DOCUMENTS

7
(FIVE YEARS 0)

H-INDEX

1
(FIVE YEARS 0)

Published By Intechopen

9781789238099, 9781789238105
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

scholarly journals CMOS Compatible Wet Bulk Micromachining for MEMS Applications

2019 ◽  
Author(s):  
S. Santosh Kumar ◽  
Ravindra Mukhiya
Keyword(s):  
Cmos Compatible

scholarly journals Study on Specific Coefficient in Micromachining Process

2019 ◽  
Author(s):  
Sung-Hua Wu

scholarly journals Pico- and Femtosecond Laser Micromachining for Surface Texturing

2019 ◽  
Author(s):  
Tatsuhiko Aizawa ◽  
Tadahiko Inohara
Keyword(s):  
Femtosecond Laser ◽  
Surface Texturing ◽  
Laser Micromachining ◽  
Femtosecond Laser Micromachining

Silicon-Based Micromachining Process for Flexible Electronics

2019 ◽  
Author(s):  
Jiye Yang ◽  
Tao Wu
Keyword(s):  
Flexible Electronics ◽  
Silicon Based

Physical Processes and Plasma Parameters in a Radio-Frequency Hybrid Plasma System for Thin-Film Production with Ion Assistance

2019 ◽  
Author(s):  
Elena Kralkina ◽  
Andrey Alexandrov ◽  
Polina Nekludova ◽  
Aleksandr Nikonov ◽  
Vladimir Pavlov ◽  
...  
Keyword(s):  
Thin Film ◽  
Radio Frequency ◽  
Film Production ◽  
Physical Processes ◽  
Plasma Parameters ◽  
Plasma System ◽  
Hybrid Plasma ◽  
Ion Assistance ◽  
Thin Film Production

scholarly journals Micromachining of Advanced Materials

2019 ◽  
Author(s):  
Wayne N.P. Hung ◽  
Mike Corliss
Keyword(s):  
Advanced Materials

scholarly journals Multiscale Simulation of Surface Defect Influence in Nanoindentation by a Quasi-Continuum Method

2019 ◽  
Author(s):  
Zhongli Zhang ◽  
Yushan Ni ◽  
Jinming Zhang ◽  
Can Wang ◽  
Xuedi Ren
Keyword(s):  
Surface Defect ◽  
Multiscale Simulation
Load More ...
Sign in / Sign up

Export Citation Format

Share Document