Physical Processes and Plasma Parameters in a Radio-Frequency Hybrid Plasma System for Thin-Film Production with Ion Assistance

2019 ◽  
Author(s):  
Elena Kralkina ◽  
Andrey Alexandrov ◽  
Polina Nekludova ◽  
Aleksandr Nikonov ◽  
Vladimir Pavlov ◽  
...  
Keyword(s):  
Thin Film ◽  
Radio Frequency ◽  
Film Production ◽  
Physical Processes ◽  
Plasma Parameters ◽  
Plasma System ◽  
Hybrid Plasma ◽  
Ion Assistance ◽  
Thin Film Production

scholarly journals Erratum to: “Influence of external conditions on physical processes and plasma parameters in a model of a high-frequency hybrid plasma system”

2017 ◽  
Vol 46 (4) ◽  
pp. 299-299
Author(s):  
A. F. Aleksandrov ◽  
A. K. Petrov ◽  
K. V. Vavilin ◽  
E. A. Kral’kina ◽  
P. A. Neklyudova ◽  
...  
Keyword(s):  
High Frequency ◽  
Physical Processes ◽  
Plasma Parameters ◽  
Plasma System ◽  
Hybrid Plasma ◽  
External Conditions

Influence of external conditions on physical processes and plasma parameters in a model of a high-frequency hybrid plasma system

2016 ◽  
Vol 45 (6) ◽  
pp. 433-441 ◽  
Author(s):  
A. F. Aleksandrov ◽  
A. K. Petrov ◽  
K. V. Vavilin ◽  
E. A. Kral’kina ◽  
P. A. Neklyudova ◽  
...  
Keyword(s):  
High Frequency ◽  
Physical Processes ◽  
Plasma Parameters ◽  
Plasma System ◽  
Hybrid Plasma ◽  
External Conditions

Stretching flows for thin film production

1978 ◽  
Vol 4 (1-2) ◽  
pp. 73-88 ◽  
Author(s):  
P.A. Gutteridge
Keyword(s):  
Thin Film ◽  
Film Production ◽  
Thin Film Production

scholarly journals Grid-Based Simulation of Industrial Thin-Film Production

SIMULATION ◽  
2005 ◽  
Vol 81 (1) ◽  
pp. 77-85 ◽  
Author(s):  
V. V. Krzhizhanovskaya ◽  
P. M.A. Sloot ◽  
Yu. E. Gorbachev
Keyword(s):  
Thin Film ◽  
Film Production ◽  
Grid Based ◽  
Thin Film Production

Next generation end hall ion source in the optical thin film production process

2008 ◽  
Author(s):  
Hansjörg Niederwald ◽  
Leonard Mahoney
Keyword(s):  
Thin Film ◽  
Production Process ◽  
Ion Source ◽  
Film Production ◽  
Next Generation ◽  
Optical Thin Film ◽  
Thin Film Production

scholarly journals Compression of dry lysozyme targets: The target preparation pressure as a new parameter in protein thin film production by pulsed laser deposition

2019 ◽  
Vol 481 ◽  
pp. 120-124 ◽  
Author(s):  
Catalin Constantinescu ◽  
Andreea Matei ◽  
Marshall Tabetah ◽  
Maria Dinescu ◽  
Leonid V. Zhigilei ◽  
...  
Keyword(s):  
Thin Film ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Film Production ◽  
Target Preparation ◽  
Thin Film Production

Silicon nitride thin film production on Si(111)

1993 ◽  
Vol 73 (10) ◽  
pp. 4927-4931 ◽  
Author(s):  
M. L. Colaianni ◽  
P. J. Chen ◽  
N. Nagashima ◽  
J. T. Yates
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Film Production ◽  
Thin Film Production

Highly Soluble Ligand Stabilized Tin Oxide Nanocrystals: Gel Formation and Thin Film Production

2014 ◽  
Vol 14 (9) ◽  
pp. 4819-4826 ◽  
Author(s):  
James S. McManus ◽  
Patrick D. Cunningham ◽  
Laura B. Regan ◽  
Alison Smith ◽  
Dermot W. McGrath ◽  
...  
Keyword(s):  
Thin Film ◽  
Tin Oxide ◽  
Film Production ◽  
Gel Formation ◽  
Soluble Ligand ◽  
Thin Film Production

Composite thin‐film production by ion bombardment

1987 ◽  
Vol 5 (4) ◽  
pp. 1250-1253 ◽  
Author(s):  
W. Carr ◽  
M. Seidl ◽  
G. S. Tompa ◽  
A. Souzis
Keyword(s):  
Thin Film ◽  
Ion Bombardment ◽  
Composite Thin Film ◽  
Film Production ◽  
Thin Film Production
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