Структурные свойства углеродных пленок, полученных методом ионно-стимулированного импульсно-плазменного осаждения в атмосфере азота

Carbon films were synthesized by pulse-plasma ion-assisted graphite sputtering in the atmosphere of argon-nitrogen mixture. The samples were studied by Raman spectroscopy, electron diffraction and XPS. According to the obtained data, nitrogen efficiently incorporates into the material structure, which leads to the formation of oriented graphite nanoclusters, which fraction reduces with ion assistance energy increase.