Particles on Surfaces 3
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Published By Springer US

9781489923691, 9781489923677
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Identification and Removal of Storage Induced Particle Contamination on Silicon Wafer Surfaces

1991 ◽  
pp. 271-276
Author(s):  
Brent Carlson ◽  
Lillian Gulbrandsen ◽  
Donald C. Grant
Keyword(s):  
Silicon Wafer ◽  
Particle Contamination ◽  
Wafer Surfaces

Ultra-Clean Air Ionizers for Suppression of Particulate Surface Contamination

1991 ◽  
pp. 249-256
Author(s):  
Philip C. D. Hobbs ◽  
J. Samuel Batchelder ◽  
Vaughn P. Gross ◽  
Kenneth D. Murray
Keyword(s):  
Surface Contamination ◽  
Clean Air ◽  
Particulate Surface

Ultrasonic Cleaning of Surfaces: An Overview

1991 ◽  
pp. 217-237 ◽  
Author(s):  
Ismail Kashkoush ◽  
Ahmed Busnaina ◽  
Frederick Kern ◽  
Robert Kunesh
Keyword(s):  
Ultrasonic Cleaning

BRDF Measurements and Mie Scattering Analysis of Spherical Particles on Optical Surfaces

1991 ◽  
pp. 107-121
Author(s):  
Robert J. Champetier ◽  
Michael Sobelman ◽  
Julio R. Blanco
Keyword(s):  
Mie Scattering ◽  
Spherical Particles ◽  
Optical Surfaces

Particle Protection of Semiconductor Surfaces by Reversible Wafer Bonding and Related Concepts

1991 ◽  
pp. 239-247
Author(s):  
U. Gösele ◽  
V. Lehmann ◽  
R. Stengl ◽  
K. Mitani ◽  
T. Y. Tan ◽  
...  
Keyword(s):  
Wafer Bonding ◽  
Semiconductor Surfaces

Particles in Ulsi Grade Chemicals and Their Adhesion to Silicon Surfaces

1991 ◽  
pp. 35-49 ◽  
Author(s):  
Mitsushi Itano ◽  
Ichiro Kawanabe ◽  
Frederick W. Kern ◽  
Masayuki Miyashita ◽  
Reed W. Rosenberg ◽  
...  
Keyword(s):  
Silicon Surfaces
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