Microsystems - Optimal Synthesis Methods for MEMS
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10
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Published By Springer US
9781461351016, 9781461504870
2003 ◽
pp. 13-42
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Keyword(s):
2003 ◽
pp. 121-153
Keyword(s):
2003 ◽
pp. 223-265
Keyword(s):
2003 ◽
pp. 297-316
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Keyword(s):
2003 ◽
pp. 267-295