Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation

In this paper, we report a novel laterally actuated Radio Frequency (RF) Microelectromechanical Systems (MEMS) switch, which is based on a combination of electrothermal actuation and electrostatic latching hold. The switch takes the advantages of both actuation mechanisms: large actuation force, low actuation voltage, and high reliability of the thermal actuation for initial movement; and low power consumption of the electrostatic actuation for holding the switch in position in ON state. The switch with an initial switch gap of 7 µm has an electrothermal actuation voltage of 7 V and an electrostatic holding voltage of 21 V. The switch achieves superior RF performances: the measured insertion loss is −0.73 dB at 6 GHz, whereas the isolation is −46 dB at 6 GHz. In addition, the switch shows high reliability and power handling capability: the switch can operate up to 10 million cycles without failure with 1 W power applied to its signal line.

Optical-Thermally Excited Graphene Resonant Mass Detection: A Molecular Dynamics Analysis

In consideration of the presented optical-thermally excited resonant mass detection scheme, molecular dynamics calculations are performed to investigate the thermal actuation and resonant mass sensing mechanism. The simulation results indicate that an extremely high temperature exists in a 6% central area of the graphene sheet exposed to the exciting laser. Therefore, constraining the laser driving power and enlarging the laser spot radius are essential to weaken the overheating in the middle of the graphene sheet, thus avoiding being burned through. Moreover, molecular dynamics calculations demonstrate a mass sensitivity of 214 kHz/zg for the graphene resonator with a pre-stress of 1 GPa. However, the adsorbed mass would degrade the resonant quality factor from 236 to 193. In comparison, the sensitivity and quality factor could rise by 1.3 and 4 times, respectively, for the graphene sheet with a pre-stress of 5 GPa, thus revealing the availability of enlarging pre-stress for better mass sensing performance.

4D Printing Pre-Strained Structures for Fast Thermal Actuation

Four-dimensional (4D) printing is an emerging technology by adding the dimension of time-dependent reconfiguration into 3D printing. It enables the 3D printed structure to change the shape, property, or functionality under external stimuli such as temperature, magnetic field, and light, etc. Among the existing 4D printed structures, thermal responsive structures are widely used for their easy operation. However, the slow actuation of the thermal responsive structures impedes the applications like soft robotics. In the current work, a pre-strained strategy is proposed to accelerate the actuation of thermal responsive structures. A 4D printing platform that can apply strain during the printing process is constructed to fabricate the pre-strained structures under the aid of in-situ tensile of the printing base. A bilayer structure with one pre-strained layer and the other non-pre-strained layer is integrally printed. Through experiments and the finite element analysis, it is demonstrated that the aspect ratio has little effect on the deformation of the bilayer structure, whereas the pre-strain plays a key role in the deformation and also greatly accelerates the actuation of the bilayer structure. Based on the 4D printed pre-strained bilayer structure, an energy-free gripper is fabricated and a fully soft crawler is printed to achieve a high running speed.

Somatosensory actuator based on stretchable conductive photothermally responsive hydrogel

Mimicking biological neuromuscular systems’ sensory motion requires the unification of sensing and actuation in a singular artificial muscle material, which must not only actuate but also sense their own motions. These functionalities would be of great value for soft robotics that seek to achieve multifunctionality and local sensing capabilities approaching natural organisms. Here, we report a soft somatosensitive actuating material using an electrically conductive and photothermally responsive hydrogel, which combines the functions of piezoresistive strain/pressure sensing and photo/thermal actuation into a single material. Synthesized through an unconventional ice-templated ultraviolet–cryo-polymerization technique, the homogenous tough conductive hydrogel exhibited a densified conducting network and highly porous microstructure, achieving a unique combination of ultrahigh conductivity (36.8 milisiemens per centimeter, 103-fold enhancement) and mechanical robustness, featuring high stretchability (170%), large volume shrinkage (49%), and 30-fold faster response than conventional hydrogels. With the unique compositional homogeneity of the monolithic material, our hydrogels overcame a limitation of conventional physically integrated sensory actuator systems with interface constraints and predefined functions. The two-in-one functional hydrogel demonstrated both exteroception to perceive the environment and proprioception to kinesthetically sense its deformations in real time, while actuating with near-infinite degrees of freedom. We have demonstrated a variety of light-driven locomotion including contraction, bending, shape recognition, object grasping, and transporting with simultaneous self-monitoring. When connected to a control circuit, the muscle-like material achieved closed-loop feedback controlled, reversible step motion. This material design can also be applied to liquid crystal elastomers.