1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133)
Latest Publications

TOTAL DOCUMENTS

26

(FIVE YEARS 0)

H-INDEX

2

(FIVE YEARS 0)

Published By IEEE

0780351797

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

TSMC South Site Contractor Safety Management, TSMC

1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133) ◽

10.1109/smtw.1998.722687 ◽

2005 ◽

Author(s):

C.H. Chang ◽

C.M. Lai

Keyword(s):

Safety Management

Download Full-text

Reduce The Impact Of Bottleneck: A Simulation Based Flow-in System, UMC

1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133) ◽

10.1109/smtw.1998.722663 ◽

2005 ◽

Author(s):

Powen Hsieh ◽

Kenry Ko

Keyword(s):

Simulation Based ◽

Download Full-text

Challenges For Taiwan Semiconductor Industry In 21st Century

1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133) ◽

10.1109/smtw.1998.722643 ◽

2005 ◽

Author(s):

Chintay Shih

Keyword(s):

21St Century ◽

Semiconductor Industry

Download Full-text

Future Of The Foundry Model

1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133) ◽

10.1109/smtw.1998.722646 ◽

2005 ◽

Author(s):

D. Horst

Download Full-text

Order Management System in a Semi-Automatic 6" Fabrication, UMC

1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133) ◽

10.1109/smtw.1998.722701 ◽

2005 ◽

Author(s):

H.H. Chou

Keyword(s):

Management System ◽

Order Management

Download Full-text

Linear approach in photo automation

1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133) ◽

10.1109/smtw.1998.722700 ◽

2002 ◽

Author(s):

D. Chen ◽

B. Tsai ◽

T. Chang

Keyword(s):

Linear Approach

Download Full-text

A methodological approach to overcome the technology/equipment inherited limitations for yield improvement

1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133) ◽

10.1109/smtw.1998.722689 ◽

2002 ◽

Author(s):

M. Mao ◽

V. Chen ◽

E.H.S. Hsing ◽

H. Huang ◽

N. Shen ◽

...

Keyword(s):

Methodological Approach ◽

Yield Improvement

Download Full-text

Critical concerns and special requirements for technology transferred from R&D to manufacturing

1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133) ◽

10.1109/smtw.1998.722693 ◽

2002 ◽

Author(s):

N. Shen ◽

C. Fan ◽

E.H.S. Hsing ◽

H. Huang ◽

M. Mao ◽

...

Download Full-text

EPIS (equipment and process information system) a new prospect of EDA and SPC system

1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133) ◽

10.1109/smtw.1998.722691 ◽

2002 ◽

Author(s):

C. Chou ◽

K. Yang ◽

G. Chiang ◽

R. Shiao

Keyword(s):

Information System ◽

Process Information ◽

Download Full-text

A real-time equipment monitoring and fault detection system

1998 Semiconductor Manufacturing Technology Workshop (Cat. No.98EX133) ◽

10.1109/smtw.1998.722666 ◽

2002 ◽

Author(s):

R.S. Guo ◽

A. Chen ◽

C.L. Tseng ◽

I.K. Fong ◽

A. Yang ◽

...

Keyword(s):

Fault Detection ◽

Real Time ◽

Detection System ◽

Equipment Monitoring

Download Full-text