[1993] Proceedings IEEE Micro Electro Mechanical Systems
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Published By IEEE

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Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Batch-fabricated milli-actuators

[1993] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1993.296926 ◽

2002 ◽

Cited By ~ 11

Author(s):

L.-S. Fan ◽

L.H. Lane ◽

N. Robertson ◽

L. Crawforth ◽

M.A. Moser ◽

...

Integrated force arrays

[1993] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1993.296931 ◽

2002 ◽

Cited By ~ 25

Author(s):

S.M. Bobbio ◽

M.D. Kellam ◽

B.W. Dudley ◽

S. Goodwin-Johansson ◽

S.K. Jones ◽

...

High-power and high-efficiency electrostatic actuator

[1993] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1993.296916 ◽

2002 ◽

Cited By ~ 21

Author(s):

T. Niino ◽

S. Egawa ◽

T. Higuchi

Keyword(s):

High Power ◽

High Efficiency ◽

Electrostatic Actuator

Measurement of micromotor dynamics in lubricating fluids

[1993] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1993.296912 ◽

2002 ◽

Cited By ~ 3

Author(s):

K. Deng ◽

V.R. Dhuler ◽

M. Mehregany ◽

E.W. Jansen

Measurement of slow crack growth in silicon and nickel mechanical devices

[1993] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1993.296960 ◽

2002 ◽

Cited By ~ 7

Author(s):

S.B. Brown ◽

G. Povirk ◽

J. Connally

Keyword(s):

Crack Growth ◽

Slow Crack Growth ◽

Mechanical Devices

A new step motion of polysilicon microstructures

[1993] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1993.296910 ◽

2002 ◽

Cited By ~ 4

Author(s):

T. Akiyama ◽

K. Shono

Keyword(s):

Step Motion

SCREAM I: A single mask, single-crystal silicon process for microelectromechanical structures

[1993] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1993.296930 ◽

2002 ◽

Cited By ~ 25

Author(s):

K.A. Shaw ◽

Z.L. Zhang ◽

N.C. MacDonald

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Crystal Silicon

Micro mixer with fast diffusion

[1993] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1993.296914 ◽

2002 ◽

Cited By ~ 49

Author(s):

R. Miyake ◽

T.S.J. Lammerink ◽

M. Elwenspoek ◽

J.H.J. Fluitman

Keyword(s):

Fast Diffusion ◽

Micro Mixer

Distributed electrostatic micro actuator

[1993] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1993.296944 ◽

2002 ◽

Cited By ~ 17

Author(s):

M. Yamaguchi ◽

S. Kawamura ◽

K. Minami ◽

M. Esashi

Keyword(s):

Micro Actuator

Piezoelectrically operated actuators by quartz micromachining for optical application

[1993] Proceedings IEEE Micro Electro Mechanical Systems ◽

10.1109/memsys.1993.296967 ◽

2002 ◽

Cited By ~ 3

Author(s):

H. Toshiyoshi ◽

H. Fujita ◽

T. Kawai ◽

T. Ueda

[1993] Proceedings IEEE Micro Electro Mechanical SystemsLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Batch-fabricated milli-actuators

Integrated force arrays

High-power and high-efficiency electrostatic actuator

Measurement of micromotor dynamics in lubricating fluids

Measurement of slow crack growth in silicon and nickel mechanical devices

A new step motion of polysilicon microstructures

SCREAM I: A single mask, single-crystal silicon process for microelectromechanical structures

Micro mixer with fast diffusion

Distributed electrostatic micro actuator

Piezoelectrically operated actuators by quartz micromachining for optical application

[1993] Proceedings IEEE Micro Electro Mechanical Systems
Latest Publications