Micro/Nano Technologies - Micro Electro Mechanical Systems
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Published By Springer Singapore

9789811059445, 9789811059452
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Microelectrode Array

2018 ◽  
pp. 1379-1411
Author(s):  
Renxin Wang ◽  
Huaiqiang Yu ◽  
Zhihong Li
Keyword(s):  
Microelectrode Array

A Double Differential Torsional MEMS Accelerometer with Improved Temperature Robustness

2018 ◽  
pp. 461-515
Author(s):  
Dingbang Xiao ◽  
Xuezhong Wu ◽  
Qingsong Li ◽  
Zhanqiang Hou
Keyword(s):  
Mems Accelerometer

RF MEMS Switch

2018 ◽  
pp. 1039-1076
Author(s):  
Li-Feng Wang ◽  
Qing-An Huang ◽  
Lei Han
Keyword(s):  
Rf Mems ◽  
Rf Mems Switch ◽  
Mems Switch

A MEMS Inertial Switch Based on Nonsilicon Surface Micromachining Technology

2018 ◽  
pp. 945-995 ◽  
Author(s):  
Zhuoqing Yang ◽  
Guifu Ding ◽  
Yan Wang ◽  
Xiaolin Zhao
Keyword(s):  
Surface Micromachining ◽  
Inertial Switch

Passive MEMS DC Electric Current Sensors

2018 ◽  
pp. 625-655
Author(s):  
Dong F. Wang ◽  
Huan Liu ◽  
Xuesong Shang ◽  
Weikang Xian ◽  
Yipeng Hou ◽  
...  
Keyword(s):  
Electric Current ◽  
Current Sensors
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