Micro/Nano Technologies - Micro Electro Mechanical Systems
Latest Publications

TOTAL DOCUMENTS

40

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H-INDEX

2

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Published By Springer Singapore

9789811059445, 9789811059452

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Online Test Microstructures of the Mechanical Properties for Micromachined Multilayered Films

Micro/Nano Technologies - Micro Electro Mechanical Systems ◽

10.1007/978-981-10-5945-2_9 ◽

2018 ◽

pp. 197-235

Author(s):

Zai-Fa Zhou ◽

Qing-An Huang ◽

Xin-Ge Guo ◽

Yi-Fan Gu

Keyword(s):

Mechanical Properties ◽

Multilayered Films ◽

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RF MEMS Switch

Micro/Nano Technologies - Micro Electro Mechanical Systems ◽

10.1007/978-981-10-5945-2_34 ◽

2018 ◽

pp. 1039-1076

Author(s):

Li-Feng Wang ◽

Qing-An Huang ◽

Lei Han

Keyword(s):

Rf Mems ◽

Rf Mems Switch ◽

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A MEMS Inertial Switch Based on Nonsilicon Surface Micromachining Technology

Micro/Nano Technologies - Micro Electro Mechanical Systems ◽

10.1007/978-981-10-5945-2_31 ◽

2018 ◽

pp. 945-995 ◽

Author(s):

Zhuoqing Yang ◽

Guifu Ding ◽

Yan Wang ◽

Xiaolin Zhao

Keyword(s):

Surface Micromachining ◽

Inertial Switch

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Microelectrode Array

Micro/Nano Technologies - Micro Electro Mechanical Systems ◽

10.1007/978-981-10-5945-2_41 ◽

2018 ◽

pp. 1379-1411

Author(s):

Renxin Wang ◽

Huaiqiang Yu ◽

Zhihong Li

Keyword(s):

Microelectrode Array

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A Double Differential Torsional MEMS Accelerometer with Improved Temperature Robustness

Micro/Nano Technologies - Micro Electro Mechanical Systems ◽

10.1007/978-981-10-5945-2_17 ◽

2018 ◽

pp. 461-515

Author(s):

Dingbang Xiao ◽

Xuezhong Wu ◽

Qingsong Li ◽

Zhanqiang Hou

Keyword(s):

Mems Accelerometer

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Behavior Modeling and Simulation of an Inertial Sensor

Micro/Nano Technologies - Micro Electro Mechanical Systems ◽

10.1007/978-981-10-5945-2_5 ◽

2018 ◽

pp. 155-193

Author(s):

Honglong Chang ◽

Jianbing Xie ◽

Ying Liu

Keyword(s):

Modeling And Simulation ◽

Inertial Sensor ◽

Behavior Modeling

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Integrated Vacuum Microsensor Systems in CMOS Technology

Micro/Nano Technologies - Micro Electro Mechanical Systems ◽

10.1007/978-981-10-5945-2_10 ◽

2018 ◽

pp. 577-594

Author(s):

Jiaqi Wang ◽

Zhenan Tang

Keyword(s):

Cmos Technology

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Electrode Array for Neural Interfaces

Micro/Nano Technologies - Micro Electro Mechanical Systems ◽

10.1007/978-981-10-5945-2_42 ◽

2018 ◽

pp. 1437-1465 ◽

Author(s):

Weihua Pei ◽

Hongda Chen

Keyword(s):

Electrode Array ◽

Neural Interfaces

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Piezoelectric Micro/Nano Mechanical Devices for Frequency Control and Chemical Sensing

Micro/Nano Technologies - Micro Electro Mechanical Systems ◽

10.1007/978-981-10-5945-2_23 ◽

2018 ◽

pp. 817-846

Author(s):

Wei Pang ◽

Menglun Zhang ◽

Ji Liang

Keyword(s):

Chemical Sensing ◽

Frequency Control ◽

Mechanical Devices

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Traveling-Wave Micropumps

Micro/Nano Technologies - Micro Electro Mechanical Systems ◽

10.1007/978-981-10-5945-2_29 ◽

2018 ◽

pp. 1017-1035

Author(s):

Guohua Liu ◽

Wei Zhang

Keyword(s):

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