2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203)
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FOUP cleaning - FOSB transportation: a challenge for manufacturing on 300 mm wafers

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) ◽

10.1109/issm.2001.963022 ◽

2002 ◽

Author(s):

J. Frickinger ◽

J. Bugler ◽

G. Zielonka ◽

H. Ryssel ◽

M. Hans Dudenhausen ◽

...

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Emitter polysilicon process optimization by RGA and process proposal for interfacial oxide growth using ozonated water

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) ◽

10.1109/issm.2001.962973 ◽

2002 ◽

Author(s):

C. Willis ◽

P. Foglietti ◽

J. Artinger

Keyword(s):

Process Optimization ◽

Oxide Growth ◽

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Interoperable communication specification for AMHS

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) ◽

10.1109/issm.2001.962904 ◽

2002 ◽

Author(s):

K. Andou ◽

H. Kondo ◽

T. Masui

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Evaluation of advantages of integrating 300 mm AMHS fab layouts in the photo area

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) ◽

10.1109/issm.2001.962993 ◽

2002 ◽

Author(s):

G. Gaxiola ◽

L. Hennessy

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Simulation and dispatching systems for production fab management

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) ◽

10.1109/issm.2001.963007 ◽

2002 ◽

Author(s):

Y. Ishii ◽

N. Ito

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Cleaning technique of hot-wall batch type Ru CVD equipment by oxygen gas

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) ◽

10.1109/issm.2001.962972 ◽

2002 ◽

Author(s):

D. Choi ◽

D. Nozu ◽

K. Hasebe ◽

T. Shibata ◽

K. Nakao ◽

...

Keyword(s):

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Dynamical control method of AMHS for multi-production lines

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) ◽

10.1109/issm.2001.962920 ◽

2002 ◽

Author(s):

K. Mori ◽

A. Ono ◽

J. Iwasaki

Keyword(s):

Control Method ◽

Production Lines ◽

Dynamical Control

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The development of security system and visual service support software for on-line diagnostics

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) ◽

10.1109/issm.2001.962911 ◽

2002 ◽

Author(s):

M. Inaba ◽

T. Aizono ◽

K. Sonobe ◽

H. Fukube ◽

T. Iizumi ◽

...

Keyword(s):

Security System ◽

Service Support ◽

On Line ◽

Support Software

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Photoresist developer reclamation technology and system

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) ◽

10.1109/issm.2001.963020 ◽

2002 ◽

Author(s):

H. Sugawara ◽

Y. Tajima ◽

T. Ohmi

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Talking shop - linking training to factory indicators

2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) ◽

10.1109/issm.2001.962925 ◽

2002 ◽

Author(s):

S. Wilson

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