9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001
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Wet oxidation using single wafer furnace

2002 ◽  
Author(s):  
T. Fukada ◽  
Woo Sik Yoo ◽  
Y. Hiraga ◽  
K. Kang ◽  
R. Komatsubara
Keyword(s):  
Wet Oxidation

The UT/NIST/SA/ISMT Thermometry Test Bed - 2001

2002 ◽  
Author(s):  
K.S. Ball ◽  
K.S. Huston ◽  
B.L. Noska ◽  
M.A. Simonich ◽  
F.T. Geyling ◽  
...  
Keyword(s):  
Test Bed

Rapid thermal activation and diffusion of boron and phosphorus implants

2002 ◽  
Author(s):  
A.T. Fiory ◽  
S.G. Chawda ◽  
S. Madishetty ◽  
V.R. Mehta ◽  
N.M. Ravindra ◽  
...  
Keyword(s):  
Thermal Activation ◽  
And Diffusion

Effects of wafer emissivity on lightpipe radiometry in RTP tools

2002 ◽  
Author(s):  
K.G. Kreider ◽  
D.W. Allen ◽  
D.H. Chen ◽  
D.P. DeWitt ◽  
C.W. Meyer ◽  
...  

Steam oxidation in Applied Materials' RTP systems

2002 ◽  
Author(s):  
H.J.L. Forstner ◽  
A. Luscri ◽  
N. Ingle ◽  
M. Williams ◽  
Zheng Yuan
Keyword(s):  
Steam Oxidation
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