Handbook of Physical Vapor Deposition (PVD) Processing
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Published By Elsevier

9780815514220
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Introduction

1998 ◽  
pp. 29-55 ◽  
Author(s):  
Donald M. Mattox

Vacuum Evaporation and Vacuum Deposition

1998 ◽  
pp. 288-342
Author(s):  
Donald M. Mattox
Keyword(s):  
Vacuum Evaporation ◽  
Vacuum Deposition

Index

1998 ◽  
pp. 906-945

Preface

1998 ◽  
pp. vi-vii ◽  
Author(s):  
Donald M. Mattox

External Processing Environment

1998 ◽  
pp. 744-767
Author(s):  
Donald M. Mattox

Arc Vapor Deposition

1998 ◽  
pp. 406-425 ◽  
Author(s):  
Donald M. Mattox
Keyword(s):  
Vapor Deposition

Film Characterization and Some Basic Film Properties

1998 ◽  
pp. 569-615
Author(s):  
Donald M. Mattox
Keyword(s):  
Film Properties

Cleaning

1998 ◽  
pp. 664-743
Author(s):  
Donald M. Mattox
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