Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004.
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Press velocity dependence in nanoimprint lithography

2004 ◽  
Author(s):  
T. Yoshikawa ◽  
N. Takagi ◽  
T. Kanakugi ◽  
H. Schulz ◽  
H.-C. Scheer ◽  
...  
Keyword(s):  
Nanoimprint Lithography ◽  
Velocity Dependence

Fabrication of low line edge roughness mold by SOG replica method

2004 ◽  
Author(s):  
Y. Kurashima ◽  
H. Hiroshima ◽  
M. Komuro ◽  
N. Yamazaki ◽  
J. Taniguchi ◽  
...  
Keyword(s):  
Replica Method ◽  
Line Edge Roughness ◽  
Edge Roughness

Growth of pillar-like GaN nanostructures

2004 ◽  
Author(s):  
S. Takeda ◽  
K. Ishino ◽  
Y. Inoue ◽  
A. Tshida ◽  
H. Fujiyasu ◽  
...  
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